Advanced Thermal Sciences Taiwan Corp.

Hsinchu County,  Hsinchu County 
Taiwan
http://www.atschiller.com
  • Booth: L1021
  • - 4th Floor

ATS is a leader of heat exchange chiller manufacturer in the world.
We manufacture HEX and chillers with a operating range from -70degC~200degC.
The main application of our products specialize in main Etcher system AMT, Lam, TEL, Mattson, Hitachi, and KE etc.
Our system provide stable temperature control of +/-1 degC for wafer manufacturing process.
We lead in service and repair for all chillers in the industry.
We specialize in sales for Galden a heat transfer fluid for semiconductor.


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