Evatec AG

  • Booth: M0958
  • - 4th Floor

Welcome to Evatec- The Thin Film Powerhouse

Home of the BAK and CLUSTERLINE tools, Evatec delivers complete thin film production solutions for Advanced Packaging, Semiconductor, Optoelectronics and Photonics.  

We offer a range of batch, cluster and inline deposition systems according to customer throughput, process requirements and fab integration requirements.

Evatec's Advanced Process Control (APC) technologies set new standards in process control through "in situ" capability for control of mechanical, optical and electrical properties during the deposition cycle.

Use our "in situ" techniques to reduce your process development times, enhance your yields or increase tool throughput.  

Visit the Evtaec booth to hear about thin film production solutions for Fan Out Panel Level Proessing (FOPLP), the new Micro LED or deposition of the high performance soft magnetic layers required for integrated voltage regulators.


    CLUSTERLINE 600 is Evatec's "all in one seed layer solution" for panel level packaging applications on panel sizes up to 650 x 650mm....

  • Incorporating degas, etch and PVD sputter technologies, Evatec's CLUSTERLINE 600 delivers excellent adhesion and low Rc in processes like FOPLP  and IC substrate processing at the levels seen in wafer based processes.  Robust cluster architecture and efficient process flow ensure run rates of 24 panels per hoour.  Static panels duing proces steps ensure low particles and high process yields. Visit the Evatec booth to find out why CLUSTERLINE 600 is already qualified at the major OSATS and IDMs for Panel Level Pckaging. To learn more about Evatec solutions for Advanced Packaging click here
    HEXAGON is the proven production solution for FOWLP on 300mm at low Rc levels < 1mOhm...

  • Choose HEXAGON for FOWLP at low Rc and high throughput of >50 wafers per hour.  Visit our booth to find out how Evatec production know how ensures longest etch kit lifetimes and outstanding production yields.  To learn more about other Evatec solutions for Advanced Packaging click here
    Evatec's cluster solution offers single substrate or batch processing together with process know-how for Micro LED applications....

  • In comparison with well established LED processes,  the new smallwer structures of the new Micro LED technology  demands the production of  thinner layers and better unfirmities.  Control of particles is also critical to achieve the required device yields.  Visit the Evate booth to find out how Evatec's portfolio of fully autonated casssette to cassette production solutions on CLUSTERLINE 200 deliver the process stabilities essential to successful Micro LED production.  To learn more about production solutions for optoelectronics applications click here

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