HEIDENHAIN CO., LTD (Taiwan)

Taichung City,
Taiwan
http://www.heidenhain.tw

Booth: K2668
- 1st Floor

海德漢將展示集團一系列高精度產品，歡迎親臨現場一睹半導體設備核心的運動控制平台，為您呈現高生產效率完美並存的解決方案。

HEIDENHAIN ensure that machines and plants work productively and efficiently. Since 1948, when the company began a new in Traunreut, HEIDENHAIN has shipped over 7.5 million linear encoders, over 22 million rotary and angular encoders, 500,000 digital readouts and nearly 300,000 TNC controls. Now and in the future, this expertise provides the assurance that HEIDENHAIN was the right choice. A continuous drive to provide technically superior products in combination with reliability, closeness to the customer, and a practice-oriented frame of mind form the basis of HEIDENHAIN’s efforts. HEIDENHAIN has always sought a dialog with science and research on the one hand and with users and customers on the other. Our competence in the area of linear and angular metrology is reflected by a large number of customized solutions for users. These include the measuring and test equipment developed and built for many of the world’s standards laboratories and the angular encoders for various telescopes and satellite receiving antennas. The products in the standard HEIDENHAIN product program naturally profit from the knowledge gained in such projects.

For more information about HEIDENHAIN, please visit us at www.heidenhain.tw

Press Releases

(20200824)

Products

HEIDENHAIN LIF/LIP

LIP/LIF series for application in high and ultrahigh vacuum technology... More Info Less Info

Typ	Basline error		Substrate and mounting	Interpolation error	Measuring length
	Accuracy grade	Interval
LIP 481V LIP 481U	± 0.5 μm ± 1 μm	≤ ± 0.175 μm/ 5 mm	Scale of Zerodur glass ceramic or glass with fi xing clamps	± 7 nm	70 mm to 420 mm
LIF 481V	± 3 μm	≤ ± 0.225 μm/ 5 mm	Scale of Zerodur glass ceramic or glass with fi xing clamps	± 12 nm	70 mm to 1020 mm
LIC 4113 V LIC 4193 V	±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm	≤ ±0.275 µm/10 mm	METALLUR scale grating on glass ceramic or glass	± 20 nm	240 mm to 3040 mm

NUMERIK JENA LIKgo

New designed incremental encoder, developed to fit customer demands. New 2-field scanning technology with extremely high signal quality, no phase and offset errors, less interpolation errors, very low power consumption and heat development.... More Info Less Info

With the all new linear encoder LIKgo NUMERIK JENA launches a completely new designed product which was especially developed to fit customer demands in a better way. The brand new 2-field scanning module brings several improvements and eases the mounting procedure for the users.

The LIKgo is the new entry-level exposed optical encoder with outstanding features and establishes the base for serveral upcoming products. This new design also unifies the well known strenghts of the NUMERIK JENA's products in a new way. Usability, a wide range of applicatin possibilites and high quality standard are the ojectives of the new LIK series.

Very small and lightweight encoder head
20 µm grating period and measuring steps up to 78.125 nm
New 2-field scanning technology with extremely high signal quality
No phase and offset errors
Less interpolation errors
Very low power consumption and heat development
Interpolated TTL signals from sensor head w/o additional electronics
Possibility of an electronic adjustment after mounting to reduce static mounting errors
Improved ADJUSTMENT TOOL connection

ETEL VULCANO 精密定位運動平台

ETEL專注於直驅運動控制技術，為滿足客戶精密運動控制的需求，致力於線性馬達、DD馬達、運動控制以及高階運動平台等多樣的產品開發，產品線完整多樣，並持續創新精進。... More Info Less Info

The Vulcano stage provides high dynamics, great bidirectional repeatability and outstanding position stability performance as well as short move and settle time due to the stiffness and symmetry of the mechanical design. This platform is equipped with a built-in vacuum suction device and allowing ISO1 clean room compatibility.

The stage is easily configurable and can be outfitted with different modules (Theta, ZTor Z3T) to best suit each individual application. The use of this platform is suitable for Wafer Process Control application such as Overlay Metrology, Critical Dimension and Thin film Metrology as well as other Back-end processes made on large panels/substrates.

Performance

Travels:
- X (upper): up to 650 mm
- Y1Y2 (lower): up to 650 mm
Move 25 mm within ±100 nm
Bidirectional repeatability ±350 nm down
Position stability down to ±0.7nm
Speed up to 1.5 m/s
Acceleration up to 25 m/s²
ISO1 clean room compatible

Customer Benefits

Outstanding move and settle time
Outstanding position stability
Dynamic flatness correction thanks to Tip tilt actuation
Limited footprint
Vacuum supply at chuck level
Easy serviceability

RSF MS15

RSF的增量式光學尺MS15獨特光學設計與安裝容許誤差較大的特色，降低了對污染的敏感度。此一系列採用獨特的掃描原理，允許高速度達10m/s。同時內建左右極限及原點訊號輸出，讓使用者能感受到機台運動狀態的穩定性... More Info Less Info

MS 15

OVERVIEWSmall dimensions

System resolution: 10 µm - 0.05 µm
Display of the signal quality directly at the scanning head via 3-coloured LED function
Easy mounting without additional test box
Easy mounting as a result of large mounting tolerances
High insensitivity to contamination by use of an extensive singlefield scanning principle
Output signals: TTL, sinus 1 Vpp
High permissible traversing speed
Reference mark (accurate and repeatable from both traversing directions)
Position selectable by customer
Integrated subdividing electronics in the encoder head: for up to times 200 interpolation (before quadrature)
Max. measuring length: 20 000 mm
Two independent switch signals (optical) for individual special functions

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