InnoLas Semiconductor GmbH

  • Booth: I2222
  • - 1st Floor


Welcome to the world of Innovative Laser Technology!

INNOLAS SEMICONDUCTOR GMBH is a Germany based company which is focussing on high quality and high reliability Wafer ID Marking and Wafer Sorting solutions for our customers in the worldwide Silicon Semiconductor, Compound Semiconductor (major 5G communications photonics and power device materials such as SiC, GaN, GaAs, InP, Ge, LN, LT) and LED industries. 

Our products offer solutions for the following applications:

• Wafer laser marking of wafer ID marking from 2" - 450 mm
• Wafer sorting from 2” - 450 mm according to ID, thickness and weight
• Wafer defect inspection and sorter

For more information, please visit www.innolas-semiconductor.com or contact our local representatives.
Local Representative in Taiwan:
Mr. S.C. Fan
DYT Taiwan Pte Ltd
1F, No.19, Sec. 1, Guangming 10th St.,
Zhubei City, Hsinchu 302, Taiwan, R.O.C
Phone: +886 3 558 7120
Email: scfan@dytt.com.tw 

  • Laser wafer ID marking 2" - 450mm
  • Wafer sorting from 2” -450mm according to ID, thickness and weight
  • Wafer defect inspection
  • Laser wafer ID marking 2" - 450mm
  • Wafer sorting from 2” -450mm according to ID, thickness and weight
  • Wafer defect inspection


 Products

  • Wafer Marking System IL C3000
    Automatic wafer marking system for soft marking of 300mm wafer...

  • IL C3000 is the ideal system for debris free marking of 300 mm wafer which are located in a FOUP. The integrated class 4 (ISO EN 14644-1) mini-environment keeps the wafer surface clean. Furthermore this system is compatible with PGV, AGV as well as OHT.
  • Wafer Marking system IL 2000
    Automatic wafer marking machine (high throughput) for up to 200 mm...

  • For high demands in throughput, the IL 2000 is the best solution for up to 200 mm wafer. This machine has 4 load/unload stations and can mark up to 200 wafer/hr.

    Furthermore, you can use this system as a wafer sorter!

  • Wafer Macro Inspection System IL C3X00
    Defects wafer embedded defects and surface particles, scratches and cracks in layers...

  • The Macro Inspection Tool is used in the Semiconductor industry to assess wafer surface quality macroscopically between individual process steps. Using two different illumination methods, the system can quickly detect a broad range of defects that are as small as a few microns in size.

    The Macro Inspection Tool detects embedded defects and surface particles, scratches and cracks in layers, residues, or layer in-homogeneities and exposure defects. Advanced illumination techniques ensure an exceptional long lifetime of the illuminators, which guarantees a low cost of ownership. 


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