ITRI Center for Measurement Standards
- 1st Floor
Welcome to AOI Total Solution Provider - CMS/ITRI.
CMS was founded by the Industrial Technology Research Institute (ITRI) in 1985. CMS developed various instrumentation technologies to meet the requirement in the Semiconductor manufacturing process of More Moore or More than Moore. Multiple AOI modules, and off-line/in-line AOI systems have been delivered while integrated with optics, mechanism, electrics and software, etc.
203 Equipment, Inspection & Measurement
Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
Line Width; Critical Dimension (CD) Measurement
Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes
Stress; Refractive Index; Reflectivity & Conductivity Measurement
Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
X-ray; XRF; 3-D X-Ray; LEXES Systems
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Wednesday, Sep 23 2020
Thursday, Sep 24 2020
Friday, Sep 25 2020
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