M.E. SCHUPP Industriekeramik GmbH

  • Booth: Virtual Experience Zone
  • - 1st Floor


Your established specialist for high-temperature technology.

Since 1996 SCHUPP® Ceramics has been developing, producing and selling high-temperature metallic-ceramic solutions, approved in Si- and SiC-Wafer semiconductor industry. We provide complex vacuum-formed insulation shapes UltraVac made of polycrystalline mullite/alumina wool to use them in diffusion and CVD furnaces up to 1450°C (2642°F) operation temperature. We are ready to offer vestibule blocks and insulation tubes for all diffusion furnaces.

The structure of the vacuum-formed shapes remains stable even at high temperature gradients within the insulation material. Thanks to the very good thermal shock behaviour, UltraVac is outstandingly suitable for use in high-temperature furnaces with large and quick temperature changes. 


 Products

  • MolyTec
    MolyTec is a customised electric heating system, which combines high purity heating elements (MoSi2) and vacuum-formed insulation (PCW) for vertical and horizontal diffusion furnaces up to 1450°C (2642°F)...

  • MolyTec combines intermetallic high purity heating elements made of molybdenum disilicide (MoSi2) and vacuum-formed insulation made of polycrystalline mullite/alumina wool (PCW) in heating systems ready for installation. The system permits controlled and precise heating at application temperatures up to 1450°C (2642°F). MolyTec is fully compatible with all technically comparable heating systems and can be integrated into oxidation/diffusion and LP CVD furnace systems.

    Your benefits with MolyTec:

    • Stability at process temperature higher than 1350°C (2462°F)
    • Quick and simple installation and exchange
    • Controlled and precise heating at application temperatures up to 1450°C (2642°F)
    • Long service life compared to common used heating systems with e.g. wire
    • Reduction of the process time in terms of higher process temperature compared to wire
    • High surface loading: 15.5 W/cm2 at 1400°C (2552°F)
    • Homogeneous temperature distribution 
  • MolyCom®-Hyper 1800
    Electric heating elements made of high purity molybdenum disilicide (MoSi2) with ceramic additives for horizontal and vertical diffusion and CVD furnaces up to 1450°C (2642°F) operation temperature....

  • MolyCom®-Hyper 1800 are electric heating elements made of the high purity intermetallic compound molybdenum disilicide (MoSi2) with ceramic additives. Thanks to their unique properties the MoSi2 elements enable a higher surface loading compared to common used electric heating like e.g. with wire. Thus they can be used for operation temperatures higher than 1350°C (2462°F).

    MolyCom®-Hyper 1800 heating elements can be combined with vacuum-formed insulation tubes made of polycrystalline mullite/alumina wool (PCW) to electric heating systems for oxidation/diffusion and LP CVD furnaces. The elements are supplied, also in complex geometries like 360° panorama heating elements.

    Your benefits with MolyCom®-Hyper 1800:

    • Higher surface loading compared to alternative heating solutions
    • Suitable for operation temperatures higher than 1350°C (2462°F) compared to common used electrical heating e.g. wire
    • Longer life time of the heating elements
    • Available as ready for installation heating system with vacuum-formed insulation tube up to 1450°C (2642°F) operation temperature, called MolyTec
  • UltraVac TAILORED TO YOUR NEEDS
    High-temperature vacuum formed-parts (PCW) as vestibule blocks and insulation tubes for all diffusion furnaces up to 1450°C (2642°F) and higher....

  • UltraVac insulation materials offer very precise dimensions, surface quality and homogeneity in particular at complex part designs. This way, we implement individual and application-specific unique shapes or small series made of polycrystalline mullite/alumina wool (PCW) for diffusion and CVD furnaces up to 1450°C (2642°F) operation temperature.

    The structure of the vacuum-formed insulation shapes remains stable even at high temperature. Thanks to the very good thermal shock behaviour, UltraVac is suitable for use in high-temperature furnaces with rapid temperature gradients.

    Your benefits with UltraVac:

    • For diffusion and CVD furnace up to 1450°C (2642°F) operation temperature
    • Shapes ready for installation available as vestibule blocks or insulation tubes as single parts or small series
    • Complex design possible
    • Very good thermal shock behaviour
    • Stable structure at high temperatures
    • Longer life time compared to common used vacuum formed insulation parts

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