Mott Corporation

Farmington,  CT 
United States
  • Booth: M0134
  • - 4th Floor

Mott is a high precision filtration and flow control company

Mott is an industry leader when it comes to designing filtration and flow control parts for the semiconductor industry. In fact, we were pioneers in bringing all-metal gas filters for high purity gas filtration to semiconductor manufacturers decades ago. Since that time, we have been engineering solutions to solve our customer’s most complex challenges and are recognized for our troubleshooting expertise and flexibility in addressing their urgent needs. Our project and application engineers are committed to taking the extra time to ensure we surpass our customer’s expectations — with each and every interaction.  Mott high purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.


  • FXP Series POU Filters
    The FXP is an Ultra High Purity (UHP) gas flter that incorporates Mott’s exclusive all fber metal media. Made for non-corrosive gases, the FXP meets the demands of UHP gas delivery applications with a high fltration effcency of particles down to 0.003 µm....

  • Applications for the FXP Series POU Filter: UHP gas sticks for Semiconductor, LED, Photovoltaic, and MEMS Equipment Hookup. UHP fltration in valve manifold boxes, gas cabinets, tool isolation gas boxes, on-board gas delivery boxes or any process requiring ultra high purity particle removal.
  • GasShield POU Bulk Filters
    High Flow Bulk Filtration with Stainless Steel Fiber Media - 1.5 nm Filtration...

  • Mott High Purity Fiber Bulk Filters provide filtration of particles down to 0.0015 µm resulting in particle-free gas.   In addition, the flow versus differential pressure performance of these filters is equal or superior to the performance of competitive polymer products on the market today. (Refer to flow rate data on the back page.)  Metal filter media is typically used downstream of purification systems, cryogenic systems and air separation plants to ensure gas quality and provide protection against catastrophic particle disturbances.  Mott provides the high-strength, all-metal solution to filtration requirements for gas flow streams at the gas pad. Mott bulk filters are ideally suited to the higher temperatures that can be encountered downstream of a purifier during heated dry down operations.
  • Mott High Purity Gas Flow Restrictors
    Mott High Purity Gas Flow Restrictors Featuring Mott’s unique porous metal media developed specifically for semiconductor manufacturing, Mott Flow Restrictors provide compact, longlasting flow control of gases without clogging....

  • A cost-effective design – Mott’s simple flow restrictor design consists of a porous metal element inside a standard fitting, providing maximum strength and
    reliability at a minimum cost.  
    Fixed, tamper-proof performance – Each Mott Flow Restrictor delivers the specified downstream flow for the life of the product. There are no moving parts or potential adjustments which can hamper performance.

    Clog-free performance, with laminar flow – The porous metal element spans the full width of the inner channel, allowing gases to move through hundreds
    of microchannels without increasing flow velocity or creating irregular flow paths. Downstream flow is smooth and constant, and the media will not wear from friction, or clog when exposed to sporadic particles.

  • Mott High Purity GasShield® Diffusers
    GasShield® Diffusers offer the longest life at 3 MILLION CYCLES and the INDUSTRY BEST PARTICLE CAPTURE AT 1.5NM...

  • Mott GasShield® Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput. Mott stainless steel diffusers provide uniform and laminar gas fl ows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. Stainless steel diffusers can withstand higher operating pressures and maintain product integrity for over 3 million cycles – the longest lifetime in the industry.

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