ATS is a leader of heat exchange chiller manufacturer in the world. We manufacture HEX and chillers with a operating range from -70degC~200degC. The main application of our products specialize in main Etcher system AMT, Lam, TEL, Mattson, Hitachi, and KE etc. Our system provide stable temperature control of +/-1 degC for wafer manufacturing process. We lead in service and repair for all chillers in the industry. We specialize in sales for Galden a heat transfer fluid for semiconductor.
Zhubei City, Hsinchu County
Seoul, 06164 Korea