<<Research, development, design, production, sales and engineering services for vacuum thin film deposition equipment and related key components.>>
◎Load Lock Type Sputter Thin Film Deposition Equipment
With the proprietary Radical Assisted Sputtering (RAS) method, the RAS Series deposits high quality and highly-reproducible optical thin film with no wavelength shift at a low temperature,including functional thin film such as decorative film and nitride film. These are environmentally-aware load lock type sputters with high productivity and small installation areas.
◎Load Lock Type High-Performance metal Thin Film Deposition Equipment PMC series
PMC Series consists of equipment that provide dramatically stabilized film for use in SAW filter.
This provides extremely high quality film of Aluminum (Al-Cu alloy).
◎High-Speed (IAD) Vacuum Thin Film Deposition Equipment SIC series
Our company uses the technology we have developed over the years to create products that are not only more cost effective than existing products, but also succeed in delivering the same high level of performance and productivity.