Tokico System Solutions, Ltd.

  • Booth: N0890
  • - 4th Floor

Ultrasonic Vortex Flowmeter for cleaning process

We, Tokico System Solutions, Ltd. , are one of the leading manufacturers of Flowmeters in Japan. Our Flowmeters have been applied in the oil and gas industries for a long time and our Ultrasonic Vortex Flowmeters have been utilized  for semiconductor cleaning process as well. In front-end process of semiconductor, cleaning is one of the most important process in order to decrease the yield ratio of the products. Hence we have 3 series of meters (PFA, PPS and PEEK) with various flow range to meet all customer requirements and applications.  We have already had more than 20years experience to supply these flowmeters for the semiconductor market in Japan. Our products may help your production activities if you have cleaning equipment ,such as wet bench or single-wafer. We are sure that we can propose suitable solutions for you.  We are always welcome if you are interested in handling our flowmeters as a distributor in Taiwan.


  • Ultrasonic Vortex Flowmeter
    Tokico System Solutions’ Ultrasonic Vortex Flowmeters are ideal for the customers those who are in the field of semiconductor cleaning. Our products have been applied in semiconductor industry for decades all over the world....

  • Tokico System Solutions’ Ultrasonic Vortex Flowmeters are one of the most trusted brands in the industry. Our products have no moving parts inside so that there is few possibility of abrasion. In addition, the products are suitable for chemicals as the parts in contact with liquid are composed by anti-corrosion resin (PFA, PEEK or PPS), which guarantee the stable and safe measurement. Also, as the parts in contact with liquid are integrated in one body with this anti-corrosion resin and there is neither a seal nor a pocket, they are available for the measurements both for chemicals and pure water.

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