Highlights
- Low demand on media supply, long granulate lifetime
- Minimal maintenance requirements
- Patented absorber design with cold trap function prevents blockages
- Available as 30 litres, 60 litres or 120 litres absorption module
- Outlet concentrations guaranteed to reach TLV
- Specifically designed granules for various applications
- Chemisorption irreversibly binds hazardous gases to granulate
- Minimum footprint
- Easy and safe cartridge replacement and global refill service available
- Quality Made in Germany
Applications
- R&D applications
- CVD applications (e.g. MOCVD)
- Etch processes
- ALD processes
- Ion implanters
- CIGS