Sealing elements made with PERFREZ® compounds are available for the following application categories:
Dynamic |
Door seals |
Gate valves |
Pendulum valves |
Lip seals |
Chamber lid seals |
Static: |
Electrode seals |
Lamp seals |
Exhaust valves |
Gas inlets / outlets |
Window seals |
Center rings |
Fittings: |
Carrier |
Wafer / FPD |
Support |
Transport |
FOUP |