Established in 2020, Electrochemical Hydrogen Purifier (ECHP) is the first commercial HPR for waste hydrogen and by-product hydrogen.
Unlike other high-risk methods, the adoption of electrochemical process allows the operation under ambient pressure and low temperature. Moreover, the ECHP shows better performance of inert gas elimination than traditional PSA method.
It is suitable for metal heat treatment, gas chromatography (GC), analytical instrument carrier gas, GaN epitaxy, III/V and II/VI MOCVD.
This feature enables our Electrochemical Hydrogen Purifier (ECHP) to obtained SEMI S2 certification for its performance, reliability, and safety in 2021, and it can be used in semiconductor factories.
A. Hydrogen & Nitrogen mixed gas enter the anode side.
B. The hydrogen atoms dissociate into electrons and hydrogen ions, and only hydrogen ions can pass through the membrane to the cathode side.
C. The electrons arrive the cathode through external circuit. The reaction rate will increase with increasing voltage.
D. Other gas like nitrogen gas can’t pass through the membrane, as the result, they are discharged.
E. The hydrogen ions and electrons recombine to hydrogen molecular at cathode side.
About 70 degrees