The increasing use of 5G and electric car worldwide has correspondingly led to a gradually increasing SIC application. The main manufacturing processes of Silicon wafer undergo rough grinding or polishing before administering chemical mechanical polishing (CMP) for lapping and grinding, but both have advantages and disadvantages. The former could easily cause scratches on the surface that will lower the quality of the product and its efficiency, and the latter does not have excellent efficiency or eliminate surface roughness. In order to solve the problems, Grintimate has launched the Horizontal Hydrostatic Rotary Surface Grinder (GRC-series) to provide solutions.
The standard Horizontal Hydrostatic Rotary Surface Grinder (GRC-series) is equipped with a hydrostatic spindle and a hydrostatic rotary table, with characteristic high-rigidity and high-vibration resistance, and not having any friction or stick-slip , supporting ecentric stress and high centrifugal force processing, the spindle and work table accuracy could easily reach <1μm, the rotary table maintains a load capacity of >10,000kg, and the optimized stability of hydrostatics could not only greatly improve on avoiding scratches and maintaining grinding efficiency, but also prolong service life to greatly lower maintenance costs as well as enhance machine function stability-during operation, which is very suitable for hard and fragile material processing, such as Sic, Alumina, Zirconia, Porous Ceramics and Chuck Table, among others.
For grinding and dressing software, the machinery is quipped with a standard Mitsubishi / Fanuc controller , with a human-machine interface(HMI), which features rapid communication and convenient user-friendly controlling for operations so that the operator could quickly become acquainted with the machine , which could greatly shorten the time for programming and adjustment, and reduces the error incidence rate when editing, and thus, allowing to achieve rapid communication and enhancing the utilization rate.
The appearance design of the GRC-series has a cylindrical sheet metal design, providing optimized absorption efficiency of oil mist to contribute to environmental protection. The streamlined appearance design and the rotary table height is in accordance with user-friendly ergonomics and convenience during loading or uploading.