ITRI Center for Measurement Standards
Welcome to AOI Total Solution Provider - CMS/ITRI.
CMS was founded by the Industrial Technology Research Institute (ITRI) in 1985. CMS developed various instrumentation technologies to meet the requirement in the Semiconductor manufacturing process of More Moore or More than Moore. Multiple AOI modules, and off-line/in-line AOI systems have been delivered while integrated with optics, mechanism, electrics and software, etc.