Mott Corporation

Farmington, CT
United States
http://www.mottcorp.com

Booth: M0134
- 4th Floor

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Mott is a high precision filtration and flow control company

Mott is an industry leader when it comes to designing filtration and flow control parts for the semiconductor industry. In fact, we were pioneers in bringing all-metal gas filters for high purity gas filtration to semiconductor manufacturers decades ago. Since that time, we have been engineering solutions to solve our customer’s most complex challenges and are recognized for our troubleshooting expertise and flexibility in addressing their urgent needs. Our project and application engineers are committed to taking the extra time to ensure we surpass our customer’s expectations — with each and every interaction. Mott high purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.

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GasShield® Point-of-Use Filters

Ideal for Ultra High Purity (UHP) gas delivery applications, available in a variety of materials and are compatible with most high purity electronics grade process gases.... More Info Less Info

Mott manufactures high purity gas filters and systems in configurations ranging from 1 slpm to 200,000 slpm. Materials of construction include nickel, 316LSS and Hastelloy^® which provide highly efficient filtration for processes used in the production of integrated circuits. Mott’s specially trained engineers can provide the all-metal solutions needed for industries that require consistency in a changing environment.

Gas Flow Restrictors

If you are looking for a low-cost option to achieve consistent flow control and resistance to clogging, explore our high purity porous metal flow restrictors.... More Info Less Info

Whatever your priorities in flow control – whether you want low cost, consistent performance, or resistance to clogging – there’s one alternative that will satisfy on all counts: Mott High Purity Porous Metal Flow Restrictors. Featuring Mott’s unique porous metal media developed specifically for semiconductor manufacturing, Mott Flow Restrictors provide compact, longlasting flow control coupled with cost-effective design, fixed, tamper-proof performance and clog-free performance

GasShield® Chamber Diffusers

Mott GasShield Chamber Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber.... More Info Less Info

Mott GasShield Chamber Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity for over 6,000,000 cycles. maintain product integrity for over 6,000,000 cycles. Chamber diffusers are used for venting in load lock chambers, transfer chambers, cooling chambers and process chambers of semiconductor equipment interfaces (CVD, PVD,Etch, Epi).

GasShield® Bulk Gas Filters

Mott High Purity Bulk and Utility Filters provide 9-log filtration of particles at 0.0015 μm resulting in particle-free gas.... More Info Less Info

Our Bulk Gas Filters are the primary solution for gas flow streams at the gas pad. They are ideally suited to the higher temperatures often encountered downstream of a purifier during heated, dry down operations. These high purity bulk filters provide 9-log filtration of particles at 0.0015 µm resulting in particle-free gas.

Mott Corporation

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