FITOK GmbH

Offenbach am Main, 
Germany
http://www.fitokgroup.com

• Booth: N0289
• - 4th Floor

Welcome to visit FITOK.

Founded in 1998, FITOK Group www.fitokgroup.com has been an industry-leading developer and manufacturer of superior quality instrumentation valves and fittings, having our R&D centers, manufacturing facilities, warehousing and service locations in Offenbach Germany, Texas USA, Wuhan, Shenzhen and Suzhou China, Osan South Korea, and Dubai UAE.

We have the capability to manufacture and supply 5 different product categories, including:
■ General Instrumentation Valves and Fittings
■ Medium & High Pressure Valves and Fittings
■ High Purity & Ultra High Purity Products
■ Sampling Systems
■ Tubing

Our mission is to provide the best quality products and the most professional services to our customers. The performance of our products is guaranteed during the whole manufacturing cycle from our employment of customized materials which should be controlled more strictly than just according to ASTM requirements to our implementation of production and testing exceeding the industry standards.

Since our inception, FITOK has been applying sound quality control standards in all activities. FITOK is an ISO 9001:2015 certified company and our products have been certified by different industry authorities and third-party inspection institutions in different countries to have obtained a variety of certificates, among which there are the TA-Luft, ABS, ASTM F1387, ISO15848, TPED, E-Mark, CRN, DVGW,  PED, API 607, DOT, ECE R110 and EC 79 certificates.

Benefiting from our global facilities, we are able to optimize the most cost-effective resources worldwide. Paired with flexible manufacturing systems, we deliver a wide range of the best quality products within a competitive lead time and the most professional services to our customers in an array of applications and industries. 

 Press Releases

• FITOK Diaphragm Valves Purify Semiconductor Industry (20211209)
  

  

  Overview

  High purity diaphragm valves are mainly used in the semiconductor, natural gas, photovoltaic solar, microelectronics, liquid crystal panel, chemical, pharmaceutical and other industries. They are applicable to conditions with ultra high purity gases, corrosive gases, toxic gases, flammable and explosive fluids.

  FITOK has successively developed a variety of ultra high purity diaphragm valves based on years of industry technology accumulation to meet the high standards of the industry.

  

  Features

  • Suitable for ultra high purity applications
  • Metal-to-metal diaphragm seal to atmosphere for leak integrity
  • Radius junction flow design to reduce dead space and minimize contamination
  • Elgiloy diaphragm material with strong durability as well as corrosion resistance for long cycle life
  • Varity of handles and pneumatic actuators available
  • Choice of 2-way (straight and angle), 3-way and 4-way patterns
  • Custom manifolds available upon request

  

  Types

  

  

  Technical Parameters

  

  Note: The working temperatures of the seats are derived from experimental data. Please contact us for more service applications.

  

  Quality Assurance

  Material

  Cleaning process

  

  Class 100 clean room

  Final welding, assembly, inspection and packaging of ultra high purity products are conducted in the Class 100 cleanroom.

  

  FITOK's various ultra high purity diaphragm valves meet the stringent requirements of the semiconductor manufacturing industry for fluid system components.

  For more about FITOK products or related products, please see the product catalog. Should you have any questions, please contact us directly and our sales and technical support will reach you soon!

• VPR Series Steam Heated Vaporizing Pressure Regulator (20211209)
  

  Introduction

  FITOK VPR Series Steam Heated Vaporizing Pressure Regulator is designed to use steam to heat process media, it can be used to vaporize liquid or to preheat gas to prevent it from condensing. Users may disassemble the regulator and heat transfer components for easy cleaning and repair.

  Features

  ◎ Convoluted diaphragm design to improve regulation precision and cycle life
  ◎ Low internal volume
  ◎ Good thermal conductivity saves energy and cost
  ◎ With special cleaning and packaging, applicable to oxygen-enriched environments

  Technical Data

  Body	316L SS or Alloy 400
  Diaphragm	Hastelloy
  Lift poppet	Hastelloy
  Maximum inlet pressure	3600 psig (248.2 bar)
  Outlet pressure range	0~25 psig (0~1.7 bar), 0~50 psig (0~3.4 bar), 0~100 psig (0~6.9 bar), 0~250 psig (0~17.2 bar), 0~500 psig (0~34.5 bar)
  Medium working temperature	40°F~+500°F (-40°C~+260°C)
  Maximum vapor pressure and temperature	600 psig (41 bar) and 500°F (260°C)

  Applications

  Applicable in field such as analytical laboratory, pharmaceutical, biopharma, aerospace and industrial
  • Corrosive and specialty gases
  • Gas sample preparation
  • Gas cabinets
  • Upstream process lines

  Ordering Information

  Please see the product catalog for more information. Should you have any questions, please contact us directly or contact your nearest authorized distributor.

• Semiconductor Application- FITOK ALD Series Atomic Layer Deposition Diaphragm Valves (20211209)
  

  

  Overview

  Atomic Layer Deposition (ALD) is a method of applying thin films to various substrates with atomic scale precision. As chip node dimensions are continuously shrinking, traditional deposition techniques have reached their limits. Depositing ultra-thin layer at the nanoscale requires Atomic Layer Deposition (ALD) technology, which allows materials to be deposited one atomic layer at a time. ALD series diaphragm valves are used to deliver precise doses of gases during the deposition process used to create semiconductor chips.

  

  Features

  • Ultrahigh cycle life with high-speed actuation
  • Quick response capable of valve opening or closing time of less than 5 ms
  • Thermal actuator extends the life in applications where the body is heated
  • Contained seat to provide excellent resistance to swelling and contamination
  • Elgiloy diaphragm to provide high strength and corrosion resistance to ensure long cycle life
  • High-purity grade PFA seat with broad range of chemical compatibility
  • Minimum particle generation and dead space facilitate purging
  • Valves with inductive sensors, solenoid valve assemblies, heater cartridge and thermocouple holes are available

  

  Technical Data

  

  

  Application

  Suitable for atomic layer deposition (ALD) processes in the following semiconductor fields

  • High-K dielectrics and metal gate
  • MEMS
  • Optoelectronic materials and devices
  • Integrated circuit interconnect line diffusion barrier
  • Flat panel display (organic light emitting diode material, OLED)
  • Optical element
  • Solar cell
  • Various types of films (<100 nm)

  Please see the product catalog for more information. Should you have any questions, please contact us directly or contact your nearest authorized distributor.

• Integrated Gas System (20211209)

  Introduction

  Integrated Gas System is a modular system used for gas control in semiconductor industry. With the advance of semiconductor process technology, higher requirements for gas control system arise.

  FITOK integrated gas system adopts surface mount components conforming to SEMI standard for modular design, which makes installation and maintenance simpler while reducing the size of the system.

  

  Single Flow Path System

  Features

  ◆Modular design - shorten design time

  According to the customer's PID diagram, the design can be completed by installing standard substrate, valves (diaphragm valves, check valves, regulators), flowmeters, filters, pressure sensors and other components on the panel.

  ◆Surface mounting - easy installation and maintenance

  All components are surface mounted in accordance with SEMI standard (1.125 ''W-seal/C-seal, 1.5 ''W-seal/C-seal), and installation and later maintenance can be completed with simple tools.

  ◆Miniaturization

  The size is about 1/3 the traditional panel, and the corresponding flow path size is also reduced for better contamination control.

  ◆316LVV material, electropolishing process and orbital welding

  The wetted components are all 316LVIM-VAR austenitic stainless steel, the flow paths are all electrolytically polished (Ra0.13), and the fittings are all orbital welded.

  ◆W-seal/C-seal

  W-seal/C-seal between the components and the substrate, the sealing faces are independent of components receiving external forces, thus achieving the optimal sealing effect.

  

  Nine Flow Paths System

  Ordering Information

  FITOK can design and supply Integrated Gas System according to customer PID diagrams, where filters, pressure sensors and MFC can be provided by customers or FITOK can purchase under customer-provided brands.

  Please see the product catalog for more information. Should you have any questions, please contact us directly or contact your nearest authorized distributor.

• MU Series Bellows-Sealed Metering Valves (20211209)
  

   

  Features

  ◎ Reset spring design with no backlash for precise, repeatable flow settings, suitable for gas flow precise control  

  ◎ Micrometer handle measures stem position in 0.0008 in. (0.02 mm) increments  

  ◎ Bellows seal for stem, leak rate ≤4.0x10^-9 mbar l/s  

  ◎ Metallic gasket seal and welded seal for body-to-bellows seal available

  ◎ Welded seal working temperatures up to 900°F (482°C)  

  ◎ Metering and regulating stem tips available  

  ◎ Replaceable stem tip  

   

  Please see the product catalog for more information. Should you have any questions, please contact us directly or contact your nearest authorized distributor.  

 Products