CXsemi Company Limited

Hsinchu County, Zhubei City,, 
Taiwan
http://www.cxsemi.com.tw
  • Booth: K2568
  • - 1st Floor


Welcome to interview our new film thickness metrology tool.

CXsemi was founded in 2010 to provide professional, efficient, and high quality technical service to our customers. Our specialty is in the sales and service of used semiconductor equipment, microscope, Smart machine / 3D IC / WLP /LED / film thickness metrology tool, etc. Our corporate core values are integrity, efficiency, passion, and patience. We are a customer service driven company and we strive to bring best values to our customers. Our team is always extending our core technology to emerging applications and to meet more customers’ requirements. This is our way of creating long term values that would benefit our customer.


 Products

  • 晶圓傳送機/Wafer loader
    ADI/AEI 量測設備晶圓片傳送系統...

  • 晶圓傳送機可搭配多款金相顯微鏡、基恩斯數位顯微鏡及各光學系統,同時亦可進行晶圓表面巨觀目檢。
    而巨觀及微觀的目檢可以透過CCD來取像,並由AOI的技術自動進行瑕疵檢測。
  • 光學膜厚量測儀與晶圓形貌輪廓儀
    可依量測所需,針對模厚與輪廓的特性,做客製化功能設計...

  • 整合Horiba探頭,不僅膜厚涵蓋範圍廣(1nm~30um),亦可解析多層膜並得到其N,K參數,因應5G、車用、通訊的半導體新材料,我司亦可客製化符合客戶的需求。

    針對晶圓的翹曲,可透過輪廓儀以一片8秒的時間擷取晶圓上每個位置的高度值,獲得該晶圓的翹曲值(Bow/Warp),可取代FSM所使用的雷射掃描,是一台效率極高的量測設備。

  • CD/Overlay
    透過檢測曝光顯影製程後,上下層圖案的位移偏差,以及關鍵尺寸距離寬度,回饋數據,提升曝光機良率。...

  • Overlay shift and Critical dimension can be measured by our Overlaychek which has a 3D function to measure step height and surface roughness.Overlaychek can be customized to design CD measurement positions (each layer to scribe line), and can also cover a wild range of film to 30um.

  • SVS視覺影像辨識
    透過即時偵測與排出機台的異常,在不大改原設備下,外掛式檢測設備,有效幫助您找出問題。...

  • 半導體、光電工廠在生產過程中,受限於機器功能不夠智能化,
    無法在產品發生異常時即時停機,讓傷害減小。
    我們提供影像辨識等改造服務,協助做外掛式的檢測機制。
    在不影響原機台的設定下,發揮有效的智慧製造功能。

    目前主要應用
    1.酸洗槽設備,不明原因破片
    2.晶圓或手臂發生不明原因偏移

    利用簡易的視覺方案與準確的檢測核心,
    除了成功協助客戶節省人力外,也省下了許多工時與原物料費用,

    相信,我們會是您的最佳視覺檢測顧問。