DAS Asia Ltd. Taiwan Branch
PURPLE INNOVATIONS FOR GREEN MANUFACTURING
PURPLE INNOVATIONS FOR GREEN MANUFACTURING
DAS Environmental Expert GmbH is an environmental technology company focused on the developing and manufacturing of innovative and scalable waste gas and wastewater abatement systems serving main technology industries such as semiconductor, solar, FPD and LED.
Established in 1991 and headquartered in Dresden/Germany, DAS Environmental Expert today employs over 600 people in nine offices worldwide. Our high-tech related customers are using several thousands installed DAS abatement tools that can be maintained by our service team 24/7.
During SEMICON Taiwan 2021, we will be celebrating our 30th anniversary and furthermore announce the new TILIA DUO. TILIA is the enhanced DAS product line for advanced Etch and CVD applications. It meets the need for increasing process gas flows allowing higher wafer throughput per abatement footprint. Depending on the process, one TILIA could replace up to three smaller abatement systems. Furthermore, this new product line meets the challenge of increasing process complexity when combining Etch and CVD chambers within one tool.
達思公司是一家環保科技公司, 專注於研發並生產技術領先及穩定可靠的廢氣及廢水處理設備, 以服務半導體, 太陽能, 面板及LED等主要科技產業的客戶。
達思公司於1991年創立於德國德勒斯登, 目前在全球有9個據點, 超過600名的員工, 達思公司在全球已安裝超過數千台的設備, 分佈於各個高科技產業客戶中。達思公司的技術服務團隊提供全年無休的服務, 以確保我們的客戶能全力生產並兼顧環境保護的使命。
2021 台灣半導體展(Semicon Taiwan 2021)期間, 我們將慶祝 DAS 成立30周年，並進一步推出新產品 TILIA DUO。TILIA是DAS最新、處理效率最強的產品系列，適用於先進蝕刻和CVD製程。它满足了不斷增加的氣體處理量的需求，及不斷提高的每台設備晶圓產出需求。根据不同的製程，一台TILIA設備的footprint, 可以取代多達三台較小的設備。此外，此一新產品系列結合了處理蝕刻及CVD製程所排放廢氣的能力，可以滿足日益增長的繁複製程的挑戰。