Introduction

NanoSpice Pro is a revolutionary high-performance and highcapacity FastSPICE circuit simulator. Its dual-solver engine boosts simulation throughput of all modern complex designs including memory (DRAM, SRAM, Flash, MRAM), FPGA, custom digital and SoC circuits. 

With the breakthrough FastSPICE algorithm, intelligent topology recognition and automatic partition technology, NanoSpice Pro delivers superior performance and capacity to address advanced node verification challenges. Adaptive dual-solver technology ensures superior analog accuracy and digital performance for mixed-signal designs, benefiting from a seamless integration of the state-of-the-art digital engine and the giga-scale analog engine. 

NanoSpice Pro provides a unique one-stop memory simulation solution to meet all needs from memory cell design, memory array and compiler verification, memory characterization, and fullchip verification with up to 10X+ performance increase over other commercial simulators.  

Key Advantage

Breakthrough algorithm：Intelligent topology recognition and automatic partitioning 

Higher capacity ：Up to 10X+ faster simulation throughput 

Advanced RC reduction and fast yet accurate model evaluation 

Adaptive dual-solver ：Superior analog accuracy and digital performance 

High Performance Performance scales linearly with 32+ multi-core simulations

Unique one-stop memory simulation solution

Specifications

• Supports Hspice and Spectre netlist formats 
• Supports all public domain models, user-defined models 

-- MOSFET: BSIM3, BSIM4, BSIM-BULK, BSIM-IMG, BSIM-CMG, BSIM-SOI, LETI-UTSOI, PSP, HiSIM2, HiSIM_HV, EKV3 

-- BJT: MAXTRAM, VBIC, HICUM; TFT: a-Si TFT, poly-Si TFT

-- Diode: JUNCAP, JUNCAP200, DIODE_CMC; Varactor: MOSVAR 

-- Resistor: R2_CMC, R3_CMC; HEMT: ASM-HEMT; JFET/MESFET; TMI/Custom PMI; Bsource 

• Supports S-parameter, Transmission line (W element, T element), IBIS model 
• Supports standard output formats for data analysis: FSDB, PSFASCII, SPICEASCII, ASCII, etc 
• Unique transient output format - NWF, reduce 2x+ file size Supports VEC and VCD stimulus files 
• Supports SPEF, DSPF, DPF back-annotation 
• Supports Verilog co-simulation Supports pubilc/hybrid cloud, computer farm 
• Drop-in replacement of any FastSPICE in existing design flows  

 Application Example

    

Introduction

Primarius 9812DX is an enhanced version of the industry's de-facto standard flicker noise measurement systems 9812D and 9812B. 9812DX sets new records in measurement speed, system resolution and coverage of different types of measurement requirements for flicker noise and random telegraph noise (RTN or RTS). Flicker noise is the dominant noise for deep sub-micron CMOS, bipolar junction transistor (BJT), field effect transistor (FET) and heterojunction bipolar transistor (HBT) devices.  

The 9812DX includes an order of magnitude improvement in measurement resolution compared with the legacy systems, and higher voltage tolerance of up to 200V. The 9812DX system provides extended capability to cover extreme conditions such as diode dark current noise, and is the only system in the market that accommodates a complete range of measurement conditions for both high and low impedance devices, with a range of 10Ω-10MΩ. 

To meet the challenge of explosive growth of requirements for low frequency noise test in advanced technology node, especially in FinFET technology, 9812DX delivers a significant and innovative improvement in the design of system hardware and software. With a typical noise measurement speed of 10 sec/bias, 9812DX sets a new highspeed record. The 9812DX can be used in conjunction with the Primarius semiconductor parameter testing system FSPro – resulting in a parallel testing framework solution that significantly improves testing efficiency and throughput. 

The 9812DX has been adopted by many foundries following 9812B/D, and has become the new golden tool for low frequency noise testing. It is widely used for development of the most advanced semiconductor process technology nodes, from 14 nm and 10nm to 7nm and 5nm.  

Key Advantage

Proven gold standard:Indispensable tool for many leading foundries & top fabless companies 

Ultimate resolution:Multiple built-in LNAs provide the widest impedance matching range 

Full device type coverage:All conditions including high voltage and extreme low current 

Highest speed:Fast noise measurement speed and efficient statistical noise analysis 

Broad technology support:Proven in all technology nodes including 14/10/7/5nm  

Applications

Process quality evaluation and monitoring for advanced technology (FinFET/FD-SOI/GaN) development 

Noise characterization for SPICE model extraction 

Process/device evaluation for advanced circuit designs  

Hardware Specifications

• Wide range

-- Maximum Terminal Voltages and Currents: 200V, 200mA 

• High resolution

-- System Noise Current Resolution:<10-27A2/Hz 

• High speed

-- 10 sec/bias for typical device 1/f noise 

• Wide impedance range

-- DUT impedance range from 10Ω to 10 MΩ 

• Input/Load resistors

-- 17 Gate/Base options, 15 Drain/Collection options Voltage LNA<0.03-10MHz, 0.65nV/Hz(@5kHz) Current LNA <0.03-1MHz, 0.7pA/ Hz(@5kHz) ESD DUT Protections Built-in ADC and DSA  

Software Specifications

The 9812DX features NoiseProPlus as the built-in software. NoiseProPlus has very powerful functionality for 1/f noise and RTN noise measurement and data analysis

Specifications :

• Drivers for 9812DX/D/B/A, and all popular IV meters 
• Drivers for Cascade/SUSS/MPI probe stations 
• Multi-mode device and bias auto-measurement control 
• Simultaneous 1/f and RTN noise characterization 
• Statistical noise characterization and analysis features 
• Rich graphical and data analysis features 

 Application Example

 

Please refer to 9812/FS-Pro Technical White Paper for more technical instructions on noise testing/semiconductor parametric testing. https://www.khai-long.com/customers/whitepaper

Introduction

FS-Pro is an All-In-One Semiconductor Parameter Analyzer, effectively integrating high precision IV, CV, pulse IV, transient IV sampling and 1/f low frequency noise test in a compact machine. Most low frequency device characteristics can be measured in FS-Pro. Powerful testing and analysis functionality greatly accelerates device research and process evaluation.

FS-Pro can be used in conjunction with the Primarius low frequency noise measurement system that significantly improves noise testing efficiency and throughput. The system features a modular architecture to maintain compact size and ensure future extensibility. It also supports parallel measurement, which improves the measurement efficiency significantly.

FS-Pro has a wide range of applications for semiconductor devices, LED materials, two-dimensional materials, nano materials, and novel devices. Built-in LabExpress software features hundreds of presets and a user-friendly GUI which offer a plug and play user experience. FS-Pro has received widespread customer adoption and industry-wide recognition due to its comprehensive testing functionality. The system has been adopted not only by leading design companies, foundries and IDMs, but also many world-class universities and academic research institutions.

Key Advantage

All-In-One 

High precision IV, CV, pulse IV and transient IV sampling and 1/f noise test all parameters in one box

Provide complete low-frequency parametric characterization without switching cables or probe connections

Wide Range and High Precision 

 High speed sampling time domain signal acquisition

Modular Architect 

Modular architect enables flexible test configurations, compact size and future extensibility.

Easy to Use 

Build-in software LabExpressTM offers intuitive GUI and supports powerful measurement and analysis function, it can generate any voltage synchronous and follow waveform without complicated programming.

As 9812DX's internal SMU module 

Seamlessly integrated with 9812D/DX system and NoiseProPlus software, providing significant testing speed improvement.  

Applications

Semiconductor device characterization

Optoelectronic device and MEMS measurement

Advanced Materials and Device measurement

Non-destructive measurement and inspection

Ultra-low frequency noise measurement

Software Specifications

• LabEXpress offers an intuitive GUI and supports powerful measurement and analysis functions
• Complete DC IV, pulse IV, transient IV sampling, CV, and 1/f noise measurement functions
• Built-in device types: MOSFET，BJT，diode，resistor， capacitor; features a multitude of measurement presets for the user to perform testing efficiently and easily
• Data analysis features such as curve conversion and plotting enable device characterization analysis to be done in a short amount of time
• Supports multiple data output formats for further analysis: data can be loaded into modeling software such as BSIMProPlus and MeQLab for model extraction Professional version of LabExpress supports to control a semi-auto probe station, switching matrix for wafer mapping and testing automation. The parallel testing functionality improves testing efficiency significantly

Hardware Specifications

• DC IV

-- ±200V/1A bias range, 4 quadrants operation

-- Minimum 30fA current accuracy and 30uV voltage accuracy

-- Maximum 20W output power

• CV

-- Build-in CV: ±200V DC bias range, maximum 10kHz Bandwidth 20fF~1mF measurement range

-- External LCR: ±40V DC bias range，40Hz~5MHz bandwidth 100fF~10mF measurement range

• Pulse IV

-- ±200V/3A bias range，maximum 480W output power

-- Minimum 5pA current measurement accuracy

-- 30uV voltage measurement accuracy，minimum pulse width 50us

• Transient IV

-- Arbitrary waveform output

-- Maximum sample rate 1.8MS/s，minimum 10us time step 

• 1/f Noise

-- Standard 100kHz bandwidth，supports RTN

-- Minimum frequency resolution 1mHz, measures down to 2e-28A2⁄ /Hz and <10s/bias

-- DUT minimum impedance: 500Ω

 Application Example

                

Please refer to 9812/FS-Pro Technical White Paper for more technical instructions on noise testing/semiconductor parametric testing. https://www.khai-long.com/customers/whitepaper

Introduction

PQLab is an advanced PDK (Process Design Kit) verification platform. As the semiconductor manufacturing technology continues scaling down to smaller geometries, PDK complexity is increasing rapidly. PDK validation is much more difficult than ever before and takes time.

To address this challenge, Primarius developed PQLab as a complete solution based on years of experience in advanced PDK development and verification. PQLab is an automated QA software for PDKs, featuring a multitude of qualification mechanisms of PDK integrity including technology files, PCell CDF, PCell physical verification (DRC & LVS), and SPICE models. PQLab supports PDK verification from 0.35um to 22nm for the planar process and also from 16nm to 5nm FinFET process, covering the applications in digital logic, analog, high voltage and RF circuits. PQLab helps foundries’ PDK engineers in ensuring PDK quality, and also enables IC designers to easily analyze and qualify foundry PDKs, benchmark between different PDK versions, and different design flows.

Key Advantage

Versatility: Supports mainstream foundries' PDK format and EDA tools

Completeness:

Supports PCell, DRC/LVS, simulation and technology file validation

Supports performance benchmarks between different PDK versions and various combination of different models, LVS, and PEX

Automation: Highly - integrated automation PDK QA environment

Efficiency: Built-in pattern generation module for each PDK component

Flexibility:Support test pattern user customization 

Reusability:Existing PDK QA setting could be reused in future project  

Specifications

• Test pattern generation automation

-- Automatically generates the test patterns for DRC, LVS, CDF and other PDK components

Supports CDF verification

-- CDF Spec, CDF Callbacks ,CDF Parameter and SPICE Model parameter consistency inspection

• Supports DRC/LVS verification

-- Intelligently auto-generates the minimal set of the DRC and LVS inspection test patterns to ensure correct PDK functionality for any PCell parameter combination

• Supports comprehensive simulation

-- Ensure the PDK output consistency through automatic comparison between pre-layout and postlayout simulations

• Supports comparison of the results from different combinations of SPICE model, LVS and PEX
• Supports DC OP back-annotation function verification Supports Pcell input variable function verification

Applications

Foundry process development

Foundry PDK development and verification

Fabless & IP vendor evaluation and verification of foundries' process

 Application Example

Introduction

BSIMProPlus is industry's leading SPICE modeling platform for advanced semiconductor devices. As the technology and market leader for SPICE modeling, it has been adopted as the standard modeling tool in leading semiconductor companies worldwide for over a decade.

BSIMProPlus provides the most powerful SPICE modeling functions with its built-in parallel SPICE engine. BSIMProPlus offers full SPICE modeling capabilities from baseband to high frequency for various semiconductor devices for characterization, auto model extraction and parameter optimization in various technology nodes including 28nm, 14nm, 10nm, 7nm, 5nm and 3nm.

BSIMProPlus supports public domain SPICE models and popular proprietary models, and represents accurate and efficient SPICE modeling solution for process development and integrated circuit design.

Key Advantage

Golden modeling tool in most leading foundries and IDMs

Most complete and powerful SPICE modeling functions leveraging a decade of development and industrial use

Accurate and efficient parameter extraction and optimization engines

Build-in true SPICE simulator Unique AgeMOS reliability model testing and extraction solution

Supports MOSRA model and user-defined PRI model

Advanced modeling technologies supports all advanced process nodes, and many different types of devices and models

Applications

Advanced semiconductor process development

Semiconductor device characteristics testing

PDK/SPICE model library development

SPICE model customization and validation

Aging model development and validation

Specifications

• Supports device types 

-- MOSFET, SOI, FinFET, BJT/HBT, TFT, MESFET, HEMT, Diode, Resistor, Inductor, etc

• Supports models

-- BSIM3, BSIM4, BSIM6, BSIM-CMG, BSIM-IMG, BSIMSOI, UTSOI, HiSIM2, HiSIM_HV, PSP, GP-BJT, RPI TFT, etc

-- Continuously updated with the latest compact model versions such as BSIM4.8.1, BSIM-BULK 107.0, BSIM-CMG 111.1, BSIM IMG 103.0

• Supports latest model interface

-- TMI, OMI and PMI Supports device characteristics

-- DC, AC, Tran, Noise, RF, Statistical, LDE, Reliability, etc

-- Supports user-defined model and Verilog-A model

-- Hspice/Spectre/Eldo compatible

• Supports Device or circuit-level target modeling
• Supports model auto extraction and parameter optimization
• Supports Popular instruments from Keysight (Agilent)/Keithley for DC/AC/RF/Reliability characterization
• Supports Cascade/SUSS/MPI probe station for wafer-level semi-auto measurement 

 Application Example