Evatec AG

  • Booth: M0834
  • - 4th Floor

Welcome to Evatec- The Thin Film Powerhouse

Evatec is your partner delivering thin film production solutions for Advanced Packaging, Semiconductor, Optoelectronics and Photonics.  We offer a range of batch, cluster and inline deposition systems according to customer throughput, process requirements and fab integration requirements.  Evatec's innovative source designs combined with Advanced Control (APC) technologies set new standards in process control through "in situ" capability for control of film properties during the deposition cycle.

Visit the Evatec booth this year to hear all the latest updates in thin film production solutions :

  • With more process capability, more flexibility and more throughput the new generation of HEXAGON simply gives you MORE .  Coming in Q2 2022, be amongst the first to learn how the new HEXAGON is the perfect choice for fan-out wafer level packaging (FOWLP) 
  • From sputter and etch to PECVD, PEALD and even evaporation, find out how the new family of 200mm, 300mm and 600mm CLUSTERLINE platforms can reduce your cost of ownership for thin film production across all Evatec core markets 
  • Learn how new clustered BAK evaporator solutions can increase throughput making them the perfect choice for thin film production in high volume wireless applications

The Evatec team look forward to welcomg you to our booth.


    The new HEXAGON is coming soon. Building on the proven production know how from the first generation product, the new HEXAGON is the perfect thin film production solution in FOWLP...

  • With more proecss capability, more flexibility,  more uptime,  more productivity and more possibilities the new HEXAGON is coming soon.  Why not visit the Evatec booth to find out more about the launch schedule and find out how you can get more out of your fan-out wafer level packaging ( FOWLP) production
    The new family of 200mm, 300mm and 600mm CLUSTERLINE® thin film deposition and etch tools is more flexible than ever ....

  • The new CLUSTERLINE® family gives you more configuration options including batch or single substrate processing,  a wider choice of process technologies on a single platform than ever before, and intelligent customer support solutions that help your business grow.  Why not watch the short product video to learn more then visit the Evatec booth to discover the perfect CLUSTERLINE® configuration for your own thin film production.