AUROS Technology, Inc.

Gyeonggi-do, 
Korea (South)
http://www.aurostech.com/
  • Booth: N0983
  • - 4th Floor

Welcome to Auros Technology.! See you in our booth (#812).

AUROS Technology is a world’s leading provider of Metrology and Inspection systems in semiconductor industry. It manufactures “Overlay Metrology System” and “Pellicle & Mask Inspection System” to provide solutions for the customers. Since it was established in 2009, two major chip makers have been utilizing its products to improve their yield and productivity. With the experiences and technologies that are proven in the semiconductor field, AUROS technology has recently started contacting more customers in the world in order to solve the field issues of them and improve their productivity by supplying new technologies. AUROS technology keeps solid partnership with customers and makes efforts to increase customers’ value. 

 < Overlay metrology system >

 * Feature

  • Capable to measure down to 1xnm node (DRAM, LOGIC, NAND etc.)
  • Simple operation function with ARO (Auto Recipe Optimization)
  • Powerful user-friendly data analyzer (Eureka)
  • Flexibility to measure various targets
  • Field-proven system in customer sites