AUROS Technology, Inc.

Hwaseong, 
Korea (South)
http://www.aurostech.com/new/main/
  • Booth: N0983
  • - 4th Floor

Welcome to Auros Technology.! See you in our booth (#812).

Founded in 2009, AUROS Technology Co., Ltd. specializes in producing measuring equipment for all processes of the semiconductors. In 2011, we succeeded in the mass production of the overlay metrology for the first time in the nation, and we’ve been supplying our technology to the major clients in the global semiconductor market.

AUROS Technology Co., Ltd. has already acquired an excellence grade in the technical evaluation of a specialized assessment institution and has been recognized in the measurement equipment field by being chosen as a small hidden champion regarding material, components, and equipment. Based on our advanced technologies, we’ve been striving to develop other new measurement and inspection equipment in order to enhance the overlay metrology as well as to provide the best solutions to our customers in the future.

On the basis of creativity and a challenging spirit which is a crucial aspect of the core values of AUROS Technology, we promise to take over the market that is currently dominated by Global Competitors and contribute greatly to the domestic and global semiconductor markets through the development of products that will be appreciated anywhere in the world. 

 < Overlay metrology system >

 * Feature

  • Best accuracy & Yield improvement
  • High precision & throughput
  • High resolution pattern recognition
  • Accurate Overlay control (AOC)
  • Process monitoring
  • Data analysis tool (EUREKA)
  • Auto Recipe Optimization (ARO) & ARO manager (Recipe converter)
  • Dual Band Color Filter
  • Tunable NA