Comet Solutions Taiwan Ltd.

Synertia®, Comet’s integrated RF Power Delivery Platform, enables the unprecedented power delivery control required by plasma process tools for the next generation of microchips. Synertia®, is the RF power system that ensures powerful command and control of plasma conditions at highest speed level. A system that allows to manage the complexities of multi-layer memory and atomic-scale plasma processes.

Semiconductor fabs are home to most advanced technology manufacturing. The plasma processes necessary to manufacture advanced microchips require ultra-fast, real time plasma control. A configurable high-speed RF power system is necessary to control plasma behavior and critical process parameters to increase reliability, repeatability, and yield.

The Synertia® RF Power Delivery Platform is enabling the next generation of higher performing wafer processing tools and enhances etch and deposition process performance with more functionality and flexibility. It brings the interaction of RF Generators and RF Matching Networks to a new level. Digital control technology, intuitive visualization and well-structured data organization provide actionable insights in the plasma processes.

Comet RF Generators: At the Heart of Advanced Power Delivery
Comet offers full feature RF generators from 13 MHz to 100 MHz and power from 600 W to 7 kW with pulsing and precise power control. Our expert team provides the RF solution you need with robust designs resulting in greater operating efficiency, stability and reliability, lower heat build up and lower power consumption.

Universal Motorized Capacitor

Motorized Capacitors are the ideal solution for high-precision operation. Besides ensuring highest accuracy, capacitors with integrated drive system simplify procurement with an easy-to-install subsystem. The core component of the Universal Motorized Capacitor is a Comet variable vacuum capacitor, which includes an insulating cover, coupler and stepper-motor to drive the capacitor. A durable, backlash-free coupler connects the capacitor to the drive system. Assembled flanges ensure easy mounting in the system. Appropriate high-voltage insulation between the capacitor and the mounting flanges is also included.

Vacuum Capacitor with hybrid-cooling technology

Comet hybrid-cooling technology has been developed as an extension of the well-known Hexa-Con product range. The first hybrid-cooled, small size capacitor series offers users the best of both worlds: the compact size allows the use of higher power within the same matchbox size, and users profit from reduced total cost of ownership at the same time. When comparing diameter versus power density, the Hexa-Con series with hybrid-cooling technology is best in class.

Xtra Volt Vacuum Capacitors for low frequency applications

With the XtraVolt low frequency vacuum capacitor product range Comet meets these needs with higher voltage capability compared to standard products. This allows significant higher voltage in a compact size vacuum capacitor keeping the same form factor. The new XtraVolt low frequency vacuum capacitors with higher field strength capability can achieve higher voltage. This allows increased RF current capability and higher power density.

cito Plus’s fully integrated approach to the newest technology platforms of the semiconductor industry is also highly suitable for upgrading older plasma systems.

The cito Plus new levels of accuracy enable plasma processes to be controlled with previously unattainable precision. Together with improved RF stability, users can fully optimize their plasma equipment, and take advantage of ideas for new technologies and products. With cito Plus, our customers benefit not only from predictable plasma behavior and system integration, but also from repeatable wafer-to-wafer results and stable operation using any cable length. 

Designed to meet Current and Future Needs