SuperPlus TECH

新竹市, 
Taiwan
  • Booth: J2634
  • - 1st Floor

 Products

  • Auto Bare wafer Stocker - SPT AI2400 新型晶圓儲存裝置
    超慧科技所研發的SPT AI2400，為能夠儲存2400片wafer的倉儲設備，其整合了晶圓篩選機與純晶片儲存裝置的功能。占地面積140000cm2。<br />...

    • •具備功能
    1潔淨氣體 (XCDA或N2)換氣裝置
    1.裝置氣簾隔絕
    2.Wafer warpage偵測
    3.晶圓狀態偵測
    4.溫溼度長時間監控

Categories

200 Equipment, Assembly
  • Package Handling; Conveying Equipment
    • 207 Equipment, Process
  • Transfer Systems for Wafer; Reticles or FPD's
  • Wafer Identification; Marking Equipment
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