SUSS MicroTec (Taiwan) Co., Ltd.

Hsin-Chu City, 
Taiwan
http://www.suss.com
  • Booth: N0376
  • - 4th Floor


Welocome to SUSS MicroTec's booth No. 376

The SUSS MicroTec Group is a leading supplier of equipment and process solutions for microstructuring applications with more than sixty years of engineering experience. 

Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components.

The production of memory chips, cameras for mobile phones or tire pressure sensors – the equipment solutions of SUSS MicroTec are applied within a wide variety of manufacturing processes for applications of daily or industrial use. Customers in the semiconductor industry and related markets like Advanced Packaging, MEMS and LED appreciate our comprehensive experience in wafer processing. This makes us a valuable partner for high-volume production as well as for research and development.

 Products

  • Photomask Bake& Developer, Pre& Final Cleaner
    MaskTrack Pro solves next-gen. lithography requirements for photomask clean, bake and develop. MaskTrack Pro is designed to balance most stringent conditions of advanced 193i& EUV lithography processing with innovative techniques to maximize performance....

    • Configuration: TeraPure Imprint Template Cleaning System

    TeraPure, MaskTrack Pro’s specific system for imprint templates, is proven cleaning technology and SUSS’s industry-recognized highest first-pass cleaning yield. The modular design offers customers the flexibility needed for dynamic and developing technologies, such as nanoimprint lithography (NIL).

    • Wet Cleaning
    • Process Automation
    • Standards
    • Surface Preparation

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Dispensing Systems
  • Hot Embossing System
  • Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners
  • Wafer Level Bonders
    • 201 Equipment, Flat Panel Display
  • Laser Treatment; Cutting Systems for Panels & Photocells
    • 202 Equipment, General Use
  • Cutting; Drilling; Laser ablation; Beveling Equipment
    • 203 Equipment, Inspection & Measurement
  • Overlay Measurement
    • 204 Equipment, Mems
  • Double sided mask aligner
  • Wafer Level Bonders
    • 205 Equipment, Nanotechnology
  • Equipment, Nanotechnology Tools
    • 207 Equipment, Process
  • Bumping Systems
  • Coat; Develop; Resist Processing; Track Equipment
  • Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
  • SOI Bonders; Temporary Bonders; De-Bonders
  • Spin on Glass (SOG); on Dielectric (SOD) Track systems
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
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