SP3

Santa Clara,  CA 
United States
http://www.sp3-cvd.com

• Booth: I3010

Overview

For over 20 years, sp3 pioneered the development of CVD diamond technologies. The company has developed hot-filament reactors and processes that are allowing the practical application of diamond coatings in cost effective ways.

Today, sp3 is comprised of a team of experts in the fields of chemistry, physics, material science and manufacturing, all of which play a role in its efforts to provide the best service and solutions to our customers.

sp3 was acquired by MAPAL in 2019 in order to become a fully integrated supplier of precision tools, whist also supplying various customers in multiple regions of differing products:

• silicon wafers

• electrodes

• CMP pad conditioners

• mechanical seals

• other various CVD diamond coating applications

Alongside our CVD diamond coating services, sp3 also designs, manufactures and supplies Hot Filament CVD diamond equipment.

  Press Releases

• 675 HFCVD 鑽⽯沉積反應器系統 (Sep 05, 2023)

  鑽⽯沉積反應器系統

  能夠在多種材料上合成鑽⽯膜。

  可控制多晶鑽⽯結構，以⽣產厚度500奈⽶⾄50微⽶的奈⽶晶或微晶薄膜。

  流線型的腔室框架並簡化設施覆蓋⾯積。

  控制架是獨⽴的可調式組件，可同時控制最多4個獨⽴的反應器腔。

  系統規格

  沉積面積 .......... 每一腔室33公分x30公分（13英寸x12英寸）

  電力消耗 .......... 每一腔室最高35 kW

  氣體控制 .......... 3個質量流量控制器（MFC）迴路標準：H2，CH4，N2/ 2個額外的氣體迴路可供選擇

  壓力控制 .......... 工作範圍：6到50托 / 下游閉迴路節流閥控制

  燈絲功率 .......... 最大30千瓦：200伏特直流電，150安培

  接腳銲盤 .......... 腔室外框122公分x82公分（48英寸x 32英寸）

  高度 ................. 最高190公分（74.5英寸）

  重量 ................. 600公斤（1320磅）

  https://sp3-cvd.com/reactors

  Products