◈Resistivity 0.015Ω·cm~0.025Ω·cm
◈Diameter 100.25mm±0.25mm
◈Surface orinentation error 4°toward<11-20>±0.2°
◈Primary flat orinentation <1-100>±5°
◈Primary flat length 32.5mm±1.5mm
◈Secondary flat orinentation
90.0°CW from Primary Flat±5.0°,Silicon Face Up
◈Secondary flat length 18mm±1.5mm