Vakuum Servis s.r.o.

• Multi-purpose coating system for general vacuum experiments in the development field, and small-series production
• Heatable Stainless steel chambers with volumes from 35 to 1300 l, inner diameter 250 to 600mm (other on request), bell jar also possible
• Evaporation and Sputtering from both sides (tilting of sample)
• Various pumping stations available (Turbo-, cryo- or oil diffusion pumps)
• Final pressures < 5 · 10-7 mbar Integral leak rate < 1 · 10-5 mbar l/s

Available Sources:

• Resistance evaporators (2 – 6 kVA)
• Electron beam evaporators (3 – 15 kW) with single- or multi-pocket crucible
• Ion beam sources (IAD)
• RF and DC sputter cathodes (0.3 – 10 kW) 2“ or 4“

• Equipped with Pfeiffer Vacuum Leak detectors  ASM 340, ASI35, ASM 306 etc.
• Fully or semi automated solution, production line integration, high cycle time
• Integral vacuum test, Bombing test, Sniffing test