【Applilcation】
EPI Thickness measurement
Range: 0.3-750 μm
Precision: ±0.01 μm
Carbon & Oxygen in Silicon measurement
Range(Cs): 0.1-10 ppmA
Range(Oi): 0.3-35 ppmA
Precision(Cs): STD 0.05 ppmA
Precision(Oi): STD 0.08 ppmA
Boron & Phosphorus in BPSG Films measurement
Range(B): 1-10 Wt%
Range(P): 2-12 Wt%
Precision(B/P): ±0.05 Wt%
Hydrogen in Silicon Nitride Films measurement
Range: 3-30 Atom%
Precision: ±0.3 Atom%
Fluorine in SiO2 Films measurement
Thickness: 3000-10000Å
Precision: STD<0.2 Fwt%
Carbon-doped Films evaluation
Silicon Nitride
Silicon Oxide