SINFONIA TECHNOLOGY CO., LTD.

Minato-Ku,  Japan
http://www.sinfo-t.jp
  • Booth: M1158

Transport System for Front-End & Back-End Processes

Overview

Clean Transport System Solutions for Front-End & Back-End Processes

SINFONIA TECHNOLOGY CO., LTD. (Formerly SHINKO ELECTRIC)
http://www.sinfo-t.jp/eng

We will be showcasing our "SELOP-8" with 300/200mm Wafer Auto Switching Loadport, N2 Loadport, N2 EFEM, Soter, and Tape Frame FOUP Loadport to our visitors.
The significant demonstrations of our Total Support for various processes are including 200mm and 300mm Wafer, Tape Frame, and PLP.


  Products

  • 300㎜/200㎜ Auto Switch LOAD PORT SELOP-8.1
    300mm FOUP and 200mm Open Cassette Both can be used just by remounting!...

  • LOAD PORT SELOP08C12F-S81 Series
    Dimensions W474mm x D547mm x H1381mm(Load Port)
    W455mm x D300mm x H432mm(Tilt-type 200mmOCA)
    W430mm x D315mm x H373mm(Horizontal-type 200mmOCA)
    Weight 65kg(LP)
    13.2kg(Tilt-type 200mmOCA)
    8.5kg(Horizontal-type 200mmOCA)
  • Tape Frame FOUP LOAD PORT
    Yield improvement in post-process
    High reliability , well experience
    Load Port for 300mm is working in the front-end process in all over the world...

  • Particle free

    ① Original Door opening technology prevents particle penetration
    ② Low vibration design

    SEMI standard conformity

    CID communication

    *option

    Adaptor for open cassette is available

    *option

    Supporting N2 purge function

    *option

    Supporting various Tape Frame FOUP

    *Upon inquiry

    Applicable carrier

    • ・380mm Tape Frame 13, 25 slots