Vacuum Capacitors

Broadest selection of capacitance, power, voltage and drive systems in the market. Produced with the best materials, fabrication processes and quality standards.

RF Power Delivery Platform Synertia®

Synertia® allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. The unique, patented controls of Generator and Matching Network interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.

RF Power Generator Synertia® RFG

• Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.

• Consistent performance over millions of process steps.

• Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.

Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.

The FXE micro- and nanofocus series

Ideal for performing NDT quality control, offline inspection, and measurements of parts with defects from a few millimeters to 0.5 µm.

See beyond the image

When specifying the tube for your next micro focus project, it’s tempting to focus solely on resolution, speed, and initial cost: Three fixed parameters you can compare across spec sheets and price lists. But when choosing the perfect tube for your application, there’s more that meets the eye than just the image.

Find the perfect balance

The interplay between power and resolution, between deterioration and efficiency, between flexibility and dedication - these factors will all impact ultimate performance and total cost. There is always a compromise to be made – and the FXE is designed to maximize the possibilities of these delicate combinations while maintaining valuable uptime and the longevity of your system.

See better. Faster. More.

Electronic components and semiconductor devices are the key elements of most electronic systems. Due to their compactness and density, testing requires image resolution at low power and low voltage. Void compilations, incl. multi-area voiding, need accurate and repeatable inspection routines. The Cheetah EVO offers:

• Highly sensitive detector with optional low dosage mode
• High detail recognition through an integrated image chain
• Integrated automated defect detection and analysis (e.g. voids in bumps, THT fill level)
• High-detail resolution laminography for inspecting the internal connections of state-of-the-art advanced packaging IC devices

By implementing the X-ray and CT inspection with Cheetah EVO into R&D and production processes, semiconductor manufacturers enhance quality, improve efficiency and increase yield.

Semiconductor applications:

• Wafers and integrated circuits (die attach connections, 3D IC joints, TSV)
• Sensors
• MEMS and MOEMS 

At this year's Semicon Korea we let you experience which insights X-ray and CT can reveal in semiconductors with Augmented Reality.