Looking forward to seeing you at our booth #J3353.
Overview
FST International H.C., Ltd. has following products for semiconductor and related electronic businesses
1. CMP Process Monitor including particle size, zeta potential, and H2O2 concentration. Most of major fabs have our systems:
Major Brands and Models:
•PSS (Particle Sizing Systems): FX Nano, FX Nano OnLine, Acqusizer 780APS, 780AD, Nicomp 380, Nicomp 380 ZLS, Nicomp N3000
•GMTI: Global Measurement Technology Inc: SemiChem 4012, SemiChem APM.
2. AMC & FOUP Environment Control based on Proton Transfer Reaction (PTR) Mass Spectrometer and Ion Mobility
Major Brands and Models:
•Ionicon Analytik: PTR-TOFMS TOF 1000, TOF8000, QiTOF
•IUT Technologies: IMS, GC-IMS
3. Gas and chemical trace contamination measurements:
Major Brands and Models:
•Thermo Fisher Scientific: APIX
•Bartec: 5673 for moisture and oxygen
•CIC Photonics: FT-IR for specialty gas QC