Highly functional

The TurboStocker 2 Storage System reliably performs several critical tasks:

• Loads and stores material through operator or automated load- ports.
• Maximizes overall fab process tool utilization by buffering WIP surges at tool bays.
• Provides point-of-use WIP access for operators and tool-loading automation.
• Allows operator access to GUI-based information on any payload in any stocker in the fab.

AeroLoader 4.5 OHT

AeroLoader 4.5 Overhead Hoist Transport (OHT) System for 200mm SMIF Pod, 300mm FOUP, 6” Reticle Pod enables users to extend the useful life of the system that manages the flow of wafers and reticles throughout the fab. AeroLoader 4.5 is based on the field-proven PRI-Brooks AeroLoader 4.0 design with improved & obsolescence cleared electronics and firmware

Fast, reliable OHT system

AeroLoader^® 4.5 is BriteLab’s new 4.5 generation vehicle for fab-wide interbay and intrabay overhead transport. AeroLoader 4.5 incorporates new electronics and firmware that maximize throughput, optimize tool service time, provides unmatched flexibility and cleared obsolescence of an industry-proven OHT system.

Maximized throughput

AeroLoader 4.5 maximizes bay throughput by combining track routing modules and fast OHT vehicles with the industry’s most advanced vehicle management and routing algorithms. The advanced transport control software coupled with new AeroLoader 4.5 features enable vehicle travel both forwards and backwards. These proven hardware and software capabilities provide high system throughput with move rates in a process bay of over 300 moves per hour.

The AeroTrak™ 3 Interbay Transport Systems for 200mm SMIF Pod/Cassette and 300mm FOUP enable users to manage the flow of wafers and reticles throughout the fab. AeroTrak 3 is based on the field-proven PRI-Brooks AeroTrak 200/300 design with improved and updated electronics and firmware; AeroTrak Systems handle more than 10 million wafers per day in over 60 installations worldwide.

Extensive routing and management capabilities

The AeroTrak 3 Interbay Transport System performs three critical tasks:

>   Moves wafer or reticle carriers between stockers. Routing modules allow flexibility in the track layout by offering alternate paths and the ability to transport vehicles between floors;

>   Maintains carrier lot information and location during transport, allowing quick and easy identification at any point in the production process;

>   Ensures that carriers are transported safely, protecting both carriers and the operators in the fab.

Unparalleled flexibility

Routing modules, passive track and tight radius curves allow stocker placement in any location. In addition, the system is easy to upgrade, so users won’t be locked in if production volume or product mix changes.

Built-in reliability

The AeroTrak 3’s distributed controls architecture features auto-fail over capability, ensuring that no single mode of failure can take the entire system down