Wonder Automation Inc.

Santa Clara,  CA 
United States
https://wonderautomation.com/
  • Booth: R7522

Unlimited Wafer Handling Possibilities

Overview

Based in Silicon Valley, California, Wonder Automation brings >20 years’ related automation equipment and software experience to offer semiconductor fab’s Automated Material Handling System (AMHS) including Material Control System (MCS), Overhead Hoist Transport (OHT), Stocker, Near Tool Buffer (NTB); also high-performance special wafer transfer equipment and component.


  Products

  • Over Head Transport (OHT)
    Versatile design to carry FOUP, SMIF, Reticle pod and multi Magazine types...

  • * Realizes point-to-point, machine-to-machine high-speed automatic material transfer function

    * Proprietary HID (Contactless Power Supply) offers cost-effective power system

    * Dual Y-axis design allows additional OHB, an economical alternative to Stocker

    * Versatile design to carry FOUP, SMIF, Reticle pod and multi Magazine types

    * Ultra low profile body to fit low ceiling (2.5 Meter) 

    * ±180 degrees rotation gripping device suitable for old fab where loadport’s orientation varies

  • Material Storage Solution
    Stocker/Tower Stocker/ NTB/ OHB...

  • * Stocker is used to store various carriers such as FOUP/SMIF Pods. It has a continuous structural design to increase shock resistance and storage density. It also provides intelligent space management to reduce warehouse exit time and increase conveyor efficiency. The stocker’s dimensions can be customized according to each fab’s layout to maximize fab’s space utilization.

    * Tower Stocker is for automatic storage and transmission of carriers between floors in fabs. It transports carriers with a crane; on each floor, it connects OHT (Overhead Hoist Transport) or other stocker via conveyors. The height of tower stocker can be customized, max 3 floors’ height. 

    * NTB (Near Tool Buffer) provides a buffer area at the load/unload port of equipment, reducing the standby time of the equipment, stocker and OHT. We offer 2-4 port NTB with E84 communication to improve fab’s Overall Equipment Effectiveness (OEE). 

  • Thin Wafer / Compound Handling
    Expert in Handling Fragile Wafer...

  • For special wafer handlinng: >20-year experience, >100 configurations!

    Wafer Aligner: 

    * High precision (down to ±25μm/0.02°)

    * Vortex Technology with Safe SofTtouch for thin or fragile wafers

    * Fast swap buffering device for higher throughput

    Robotic End Effector:

    * Requires only electrical wires (6 max), sim­plifies robot and equipment design

    * Programmable gripping force available via serial communication or CAN

    * Enables handling thin & thick wafers with the same device (Bernoulli/vortex technology)

    * Complies with ISO Class 1 cleanliness

    * Features rotating distal tips that allow for random wafer access within the cassette, even with small pitch

    * Optional - self-centering, top-pick, built-in through beam mapping

    We also offer special wafer handling system such as Sorter/EFEM/ OM Loader