For special wafer handlinng: >20-year experience, >100 configurations!
Wafer Aligner:
* High precision (down to ±25μm/0.02°)
* Vortex Technology with Safe SofTtouch for thin or fragile wafers
* Fast swap buffering device for higher throughput
Robotic End Effector:
* Requires only electrical wires (6 max), simplifies robot and equipment design
* Programmable gripping force available via serial communication or CAN
* Enables handling thin & thick wafers with the same device (Bernoulli/vortex technology)
* Complies with ISO Class 1 cleanliness
* Features rotating distal tips that allow for random wafer access within the cassette, even with small pitch
* Optional - self-centering, top-pick, built-in through beam mapping
We also offer special wafer handling system such as Sorter/EFEM/ OM Loader