To challenge spectral analysis!!
Overview
Support the semiconductor industry with optical measurement.
Systems Engineering manufactures a new generation "FT-IR SE 50 series" semiconductor material characterization tools equipped with Thermo Fisher Scientific's research grade FTIR and JEL's self-transport system.
"FT-IR SE-50 series" focuses purging performance and measurement efficiency with N2, and it makes the industry's highest level of high-precision measurement.
We have wide variety of applications to suit customers needs in "SE-50 series".
【Wafer measurement】
・EPI Thickness
・Carbon & Oxygen in Silicon
・Boron & Phosphorus in BPSG Films
・Hydrogen in Silicon Nitride Films
・Fluorine in SiO2 Films
・Thickness of non-diffusion layer film
【Ingot measurement】
・Oxygen concentration
Systems Engineering introduce the feature of SE-50 series in our booth(No.0888).
Please feel free to take an opportunity to visit us!!