01. Features
-Multi-degree of freedom levitation
-Contact-free design
-Excellent reliability
-Integration of position, velocity, and temperature sensors
-Flow rate and pressure are precisely controlled
-Small footprint, low noise and low vibration
02. Applications
-Microelectronics
-Biopharmaceuticals
-Chemical synthesis
Application in the fields that require steady and continuously transportation for ultrapure fluids.
03. Advantages
-No particle generation
-Pulsation-free
-Low shear
-No lubrication needed
-No mechanical friction
-Chemical resistance
Ideal for semiconductor wet processes and biopharmaceutical manufacturing.