R-Axis for Diffusion Furnace, LPCVD : Rotary Sealing Unit
Overview
Sealink Vacuum Rotary Sealing Units are Not magnetic ferrofluid Seal.
We are looking forward to meeting you at ‘Semicon Taiwan 2024’. After your visit, we have a certainty that we can give you the optimal sealing solution for your projects based on the experiences of supplying Foundary Company. We are specialized in manufacturing and designing Rotary/Linear feedthroughs and Rotary unions.
Sealink’s feedthroughs are applied with the unique sealing technology. There are some distinctive features.
- Working at high pressure and high vacuum condition.
- Various types of media can be sealed: gas, liquid, etc.
- Our sealing technology is not based on ferrofluids or magnetics.
Competitive advantages
| Type | Condition | Media | Price |
| Magnetic Seals | Vacuum only | Gas | High |
| Sealink Seals | Vacuum & Pressure | Gas, Liquid, etc | Reasonable |
Applications : Semiconductor Industries
- CVD, MOCVD, LPCVD, PECVD, PCD, ALD, CMP, OLED, LCD, FPD, Wafer handling, Vacuum deposition,
Ion Implanter Etcher, Asher, Edge Grinder, Scrubber, RTP, Sputter, Lamp, Autoclave, Wafer robot etc.