Suzhou Supermag Intelligent Technology Co.,Ltd.

SUZHOU,  JIANGSU 
China
http://www.supermag.com
  • Booth: L0018

Supermag ® welcomes you to Booth L0018 ！

Overview

SUPERMAG (Suzhou Supermag Intelligent Technology Co., Ltd.) provides high-end Maglev Bearingless equipment based on its advanced Maglev Technology. SUPERMAG proposes industry solutions for semiconductor, bioprocessing, chemical, energy, and ultra-high vacuum by providing high-purity, low-shear force Maglev Bearingless Motors, Maglev Fluid Transport Systems, Maglev Stirring Systems and Magnetically Levitated Turbomolecular Pumps.  

SUPERMAG Maglev high-end equipment reaches the extremely high process requirements of high-end chip manufacturing standards in the semiconductor industry.

SUPERMAG Maglev equipment with low-shear force can handle the most sensitive biologics and significantly reduce cell damage in the bioprocessing industry's fluid transport and mix processes.

SUPERMAG Maglev also provides energy equipment with significant energy savings and substantially high reliability. It can also completely avoid the leakage risks caused by dynamic seals in the chemical industry.

SUPERMAG has a complete certified quality system. ISO'9001 Quality Management System Certification for the company, CE, SEMI S2 certifications for products, and other international certificates. SUPERMAG has access to the supply chain of several multi-billion-dollar customers, and SUPERMAG always provides customers with timely and effective after-sales service and technical support.

SUPERMAG has all independent intellectual property rights for its core magnetic levitation technology, 105 patents including 8 PCTs and 49 invention patents. SUPERMAG core R&D scientific and technological expert team has excellent academic research experiences overseas, such as in the US, Germany, and Japan, and one of their outstanding milestones is Maglev LVAD (one of only two in the world). In the future, SUPERMAG will continue focusing on Maglev Technology to provide customers with clean, reliable products and solutions.

  Products

  • SCM Maglev Wafer Rotation System
    Wear-free, no mechanical seals, No particle generation. Wildly applied in Oxidation, Diffusion Annealing, RTP, RTA, MOCVD, Single Wafer Cleaning, Etching, Spin Coating, and other high-end chip manufacturing processes....

    • SUPERMAG Maglev Wafer Rotation System, is designed for holding and rotating wafers in semiconductor equipment. It is applied with advanced integrated control technology for maglev bearingless motors. It can be applied in high-end chip manufacturing processes such as Oxidation, Diffusion Annealing, Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), MOCVD, Single Wafer Cleaning, Etching, Spin Coating, etc. There is wear-free, no mechanical seals and no particle generation. The hollow ring rotor is easy to customize and install. SUPERMAG Wafer Rotation System provides high cleanliness and reliability. It also offers the optimal solution for rotary motion in manufacturing processes with high cleanliness requirements. 

  • MSS Maglev Stirring System
    SUPERMAG Maglev Stirring System is highly pure and low-shear force. It can be used to mix low-shear force-sensitive biologics or Macromolecular protein solutions while producing mRNA vaccines, gene therapies, or other high-end biopharmaceutical products....

    • SUPERMAG Maglev Stirring System is applied to produce mRNA vaccines, gene therapies, and other high-end biopharmaceutical products. The maglev impeller is levitated in the fluid; it is Wear-free and has low-shear force; it can mix the fluid rapidly. Meanwhile, it is pure and gentle with substantially high reliability and uptime. It can perform excellently while dealing with high-viscosity fluid by maneuvering the maglev impeller precisely.

  • SCP Maglev Bearingless Pump System
    Highly Pure, low-shear force, wide flow range, and all pulsation-free. It also has a significantly intelligent control system and a small footprint. It can be applied in the wet cleaning process, CMP, electroplating, etc....

    • SUPERMAG Maglev Bearingless Pump System can be applied in semiconductor manufacturing processes such as the wet cleaning process, CMP, electroplating, etc. It is based on advanced active magnetic levitation; the pump impeller levitates in the fluid, wear-free, no particle generation, low-shear force, and low particle shedding. The intelligent control system and real-time adjustable speed can guarantee a stable flow and pressure. It is the optimal solution for high-purity fluid transport in high-end chip manufacturing.

  • SCT Magnetically Levitated Turbomolecular Pump
    lt has nomechanical friction, no lubricating oil, highcleanliness,high-performance reliability, and lowvibration,and it can achieve an ultra-high vacuum....

    • SUPERMAG Magnetically Levitated Turbo-molecular Pump levitates the rotor com-pletely without contact by applying advancedmagnetic bearing technology.lt has nomechanical friction, no lubricating oil, highcleanliness,high-performance reliability, and lowvibration,and it can achieve an ultra-high vacuum. ltis widely applied in semiconductor and pan-semicon-ductor industries such as wafer manufacturing, etchingthin film deposition, ion implantation, scientific research,and Photovoltaic(PV).

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