Synertia® allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. The unique, patented controls of Generator and Matching Network interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.
RF Power Generator Synertia® RFG
Users fully control the unique performance accelerators of Synertia® RF generators, including:
-
Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.
-
Consistent performance over millions of process steps.
-
Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.
Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.