Micro-Epsilon Taiwan

Capacitive sensor systems from Micro-Epsilon provide a modular, expandable and cost effective measurement system for position, distance, gap, thickness or closed loop control in the nanometre, micrometre and mm range.

From single channel, low cost OEM capacitive sensors such as the capaNCDT 6110 series, to high performance modular capaNCDT 6200 series and up to the ultra-precision capaNCDT 6500 series; Micro-Epsilon has a simple and flexible solution for capacitive measurement, designed for R&D, test, OEM and production environments, where either flexibility to expand the measurement system and/or high precision measurement is key.

All sensors can be combined with any electronic controllers to create a measurement system. Select the preferred sensor head for your application and then choose the electronics based upon your technical requirements.

The confocal measurement principle is designed for high accuracy, non contact displacement distance and position measurement against any surface: solid, transparent, polished mirrored surfaces, low reflective matt surfaces and even liquids. If a surface is transparent, a one sided thickness measurement can be achieved with inbuilt correction for the material refractive index.

Quite often confocal sensors are selected when laser triangulation or other optical sensors are not accurate or stable enough on the surface being measured. In addition, confocal sensors have an extremely small spot diameter, typically a few microns and measure in the vertical plane, so do not suffer from shadowing of the reflected light. This also enables measurement into small bores and holes.

Almost all industries benefit from this measurement principle as it can be used in both R&D and in-process measurements. In particular, the semiconductor, micro lens, automotive part, medical, glass, and MEMS industries use this sensor technology in many ways. 

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometre resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 4 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometre resolution. The IMS5420-TH is used for wafer thickness measurement.

With more than 380 laser triangulation sensor versions available from stock, Micro-Epsilon’s optoNCDT laser triangulation portfolio for displacement, distance and position measurement is the widest range available worldwide.

The product portfolio is categorised into entry-level, mid-range and high-performance sensor series. At each performance level, Micro-Epsilon laser sensors are all of high quality, offer a very competitive pricing structure and often much higher measurement performance than other comparable laser sensors on the market.