Parylene AF-4 CVD coating equipment
1. Precursor: Parylene-AF4 dimer evaporation module
2. Chamber size: diameter 400mm × height 400mm
3. Loading content: 12pcs 8” Si-wafer loading fixture
Parylene C / VT-4 / N CVD coating equipment
1. Precursor: Parylene-C/VT-4/N dimer evaporation module
2. Chamber size: diameter 880mm × height 880mm
3. Loading content: customized design of ride fixtures