1. Bare Si wafer (75mm, 100mm, 150mm, 200mm, 300mm)
2. Various Blanket wafer (100mm, 150mm, 200mm, 300mm)
3. Various Patterned wafer (available for 200mm /300mm Wafer)
- MIT 854/754 Pattern Wafer (W, Cu, Al), MIT 864/764 STI Pattern
- AMT STI Pattern Wafer (min.0.18um LS)
- 3D-ILD Pattern wafer
- Cu Hybrid Bonding Test Pattern Wafer
- KrF, ArF Litho, Immersion litho and Etched wafer
- High-dose Implanted Wafer
- TSV test wafer, low-temperature TEOS, low-temperature SiN Wafer
4. fine-patterned trench, hole wafer
5. Glass wafer