centrotherm clean solutions GmbH

Blaubeuren,  Germany
http://www.centrotherm-cs.de
  • Booth: M1142

Innovative abatement solutions for a clean environment

Overview

centrotherm clean solutions as global technology leader for industrial point-of-use waste gas treatment systems. We ensure a clean future with our high quality products and end-to-end solutions.

We are a global company headquatered in Germany and locations all over the world. Quality and innovation are the most important elements in each of our developed products. We have more than 30 years of experience in the field of environmental engineering and provide a wide product range of waste gas treatment systems for various high-tech industrial applications. Our experienced professionals with expertise in chemistry and process engineering develop and manufacture customized solutions.

We are there for you worldwide with our reliable and individual service. Together, we can make the treatment of exhaust gases more sustainable – for a better tomorrow! 


  Products

  • ASM 390/ASM 392 leak detector
    Mobile leak detectors optimized for rapid pump down and short response times on large test objects...

  • Superior performance, fast testing
    The ASM 390 and ASM 392 are the perfect leak detection solutions adapted to the semiconductor and display industries as well as to other demanding  applications where rapid pump down and high sensitivity is key. Both models are fully Semi S2 compliant.
    These leak detectors are fitted with a dry frictionless backing pump and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments. Equipped with an additional turbopump, the ASM 392 will speed up your leak detection process to reduce the downtime of your production equipment.

    Robust, accurate and reliable
    The ASM 390 and ASM 392 were developed to provide full confidence in leak testing regardless of the operator’s knowledge. They deliver premium  performances and accurate results in a minimal time, making them highly efficient in the field.
  • ATH 2804 M/ATH 3204 M turbopumps
    Compact, magnetically levitated turbopumps in the pumping speed class of 3,000 l/s...

    • High gas throughput and high temperature operation required in harsh applications
    • Tolerates exhaust pressure up to 3.4 mbar
    • Low vibration operation with an automatic out-of-balance compensation
    • Compact foot print to save variable space in a tool
    • Integrated drive electronics for a wide range of applications
    • Simple installation and easy start-up
    • Energy saving – low electricity and cooling water consumption
  • HiPace 3400 IT turbopump
    For high performance ion implantation...

  • Take your semiconductor manufacturing to new heights with our HiPace 3400 IT, the most compact and powerful turbopump designed exclusively for your demanding ion implantation applications. 

    Compact with superior pump performance
    The HiPace 3400 IT sets the standard as the most compact turbopump in its class, ensuring optimal space utilization without compromising performance. The DN 320 flange size increases the pumping capacity for process gases up to an impressive 30 %.

    Process protection for extended uptime
    The unique bearing concept and specially coated rotor design protect both your process and the pump, providing unparalleled durability and reliability. Our proven pump design, coupled with an intelligent temperature management system, provides extended uptime and extended maintenance intervals. Keep your process running smoothly without unnecessary interruptions.