DAS Asia Ltd. Taiwan Branch

Hsin­chu City,  Taiwan
http://www.das-ee.com
  • Booth: J2540

PURPLE INNOVATIONS FOR GREEN MANUFACTURING

Overview

DAS Environmental Expert GmbH is an environmental technology company focused on the developing and manufacturing of innovative and scalable waste gas and wastewater abatement systems serving main technology industries such as semiconductor, solar and LED.

Established in 1991 and headquartered in Dresden/Germany, DAS Environmental Expert today employs over 900 people in 10 offices worldwide. Our high-tech related customers are using several thousands installed DAS abatement tools that can be maintained by our service team 24/7.

Reducing Greenhouse Gas Emissions: A Shared Challenge, Responsibility, and Commitment for the Semiconductor Industry and its Suppliers.

In the global pursuit of sustainability, the semiconductor industry has emerged as a crucial player in reducing greenhouse gas emissions. As the demand for high-tech products continues to soar, the industry faces a pressing responsibility to address its environmental impact. It is a challenge faced by the semiconductor sector and its suppliers, highlighting the collective commitment towards a greener future.

The semiconductor industry's carbon footprint is vast, spanning from direct emissions (Scope 1) generated from manufacturing processes to indirect emissions (Scope 2) arising from electricity consumption. However, a significant portion of their emissions is attributed to the entire supply chain (Scope 3). This intricate web of emissions requires an all-encompassing approach to tackle the issue effectively.

Companies within the semiconductor ecosystem are actively adopting various strategies to reduce emissions. These include transitioning to renewable energy sources, enhancing energy efficiency in manufacturing, and implementing innovative technologies to minimize waste. For example, at DAS EE we offer customised solutions with our Burn-Wet systems to support the major goal of minimising CO2 emissions by 40% through our industry- leading Destruction and Removal Efficiency (DRE) performance.


  Products

  • Particle Filtration and Water Recycling
    Filtration system for with solids contaminated wastewater from burn-wet systems (e. g. processes with metal organics)...

  • Basic Features

    • Minimization of wastewater generation
    • Small footprint of the water recycling system
    • Flexibility in the system design for targeting different particle sizes
    • Automatization and seamless communication with DAS EE waste gas abatement systems but also works as a stand-alone system
  • Moving Bed Biofilm Reactor (MBBR)
    Biological wastewater treatment for the removal of IPA and any other biodegrable compounds...

  • Basic Features

    • Mixing compensation tank: integrated – max. 800 L
    • Integrated dosing system for nutrients and neutralization
    • Removal rate: > 99.6 % (for IPA)
    • Designed for Semi S2 compliance
    • Seamless communication with DAS EE waste gas abatement systems but also works as a stand-alone system
  • TILIA
    Disposal of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products...

  • Basic Features

    Burn-/Wet System (Scrubber) with liquid recirculation

    Serves up to 8 or 12 process chambers with 

    • Up to 2400 slm total flow
    • Best in class capacity per footprint
    • With cost effective integrated backup
    • Reactor capacity up to 1200 slm inert gas (per reactor)

    Implementation of safety requirements of new processes with 

    • Higher number of process modules
    • Larger process gas flows
    • Higher total flows
  • ESCAPE
    Hazardous substances of process waste gases are abated directly from where they originate (Point-of-Use)....

  • Specifications

    • Up to 2 independent waste gas and backup lines per reactor
    • Operation time > 99% through backup function
    • Second reactor allows uninterrupted operation during maintenance
    • Runs with different fuel gases and scrubber liquids
    • Low water consumption through closed-loop design
    • Available in two sizes
  • STYRAX
    Hazardous substances of process waste gases are treated directly from where they originate (Point-of-Use)...

  • Specifications

    • Up to 2 independent inlets per reactor
    • Operation time > 99% through backup function
    • Second reactor allows uninterrupted operation during maintenance
    • Runs with different fuel gases
    • Low water consumption through closed-loop design