ECM Greentech

Grenoble,  France
  • Booth: I2824

Your SEMI Partner with Equipment + Process Expertise


ECM Greentech SEMCO is present in the semiconductor market since 1986 and has extensive experience in engineering and manufacturing of mass-production and labortory furnaces for atmospheric and reduced-pressure processing as well as wafer transport automation and software control. 

The company's field of competence covers diffusion, oxidation, LPCVD and PECVD. Typiocal applications include LYDOP POCL3 and BCl3 Diffusion, LYTOX Wet and Dry Oxidation, Anneal, Silicon Nitride, Silicon Oxinitride, Poly Silicon and TEOS. To address the challenges attached to scaling from lab scale R&D to pilot line and volume manufacturing, SEMCO ECM proposes the MINILAB platform, an offsite  process development and qualification tool covering the complete range of above-named applications. 

SEMCO's Electrostatic Chucks offers smart solutions for clamping and processing of thin and ultra-thin wafers based on its proprietary ESC capacitive technology. SEMCO has been designing and manufacturing electrostatic chucks (ESC) and heating pedestals to the wafer processing industry since 1992. SEMCO ECM provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide with innovative and efficient wafer handling components as original equipment or retrofit. The company actively manages global support through our subsidiaries and service centers.

ECM SEMCO also specialized in the design and manufacture of precision valves and assemblies for the control of liquids and gases used in the fabrication of semiconductor, optical and PV materials.