Overview
Providing expert solutions to a worldwide customer base over three decades, Gencoa is among the world’s leaders in the design and manufacture of products for the vacuum coating sector. The company’s continuous innovation has led to technology which sets industry benchmarks in magnetron plasma deposition components, process monitoring and control.
With funding from Innovate UK, the UK Government’s innovation agency, Gencoa has developed “Optix” an optical gas sensor for use in any vacuum environment, functioning through a uniquely wide range of operating pressures, making it compatible with high-pressure semiconductor processes including CVD, ALD and ALE.
Unlike quadrupoles, the detector is separated from the vacuum environment by an optical window which makes the method highly robust and failsafe.
Optix uses a remote plasma spectroscopy concept which generates a small plasma within the vacuum sensor head. The Optix spectral information and sophisticated back-end software enables a range of uses for a wide range of applications. These include providing real-time leak detection, endpoint detection and process monitoring during semiconductor manufacturing.
Seeking collaborations with:
• Advanced manufacturers and researchers requiring gas sensing in any type of vacuum environment
• Collaborative R&D partners for novel thin-film development and improvement of PVD processes
• Partners that can facilitate entry into Tier 1 & 2 semiconductor supply chain companies
• PVD system builders and end-users for PVD source supply and development
• Fast reactive gas feedback control
過去30年來，Gencoa致力為全球客戶群提供專業解決方案，是全球真空鍍膜產業產品設計與製造的領導者之一。
該公司持續創新所帶來的技術，為磁控電漿沉積（magnetron plasma deposition）元件、製程監測與控制方面，樹立產業基準。 在英國創新局（Innovate UK，英國政府創新機構）的資助下，Gencoa開發出光學氣體感測器「Optix」，適用於任何真空環境，可在異常廣泛的操作壓力條件下發揮作用，因此能和化學氣相沉積（CVD）、原子層沉積（ALD）、原子層蝕刻（ALE）等高壓半導體製程相容。
和四極柱（quadrupoles）不同的是，前述偵測器透過大氣窗 （optical window）和真空環境分隔，因此非常耐用，且擁有失效安全（fail-safe）機制。
Optix應用遠端電漿體光譜法（plasma spectroscopy）概念，在真空感測器接頭內生成小型電漿體。Optix的光譜資訊和精密的後端軟體，可帶來廣泛的應用，包括在半導體製造過程中，提供即時洩漏偵測、端點偵測和製程監控等功能。
Gencoa尋求從事以下合作：
• 需要在任何類型真空環境中，進行氣體感測的先進製造業者和研究人員
• 新型薄膜開發與物理氣相沉積（PVD）製程改良的合作研發夥伴
• 有助於打入一級和二級半導體供應鏈公司的合作夥伴
• PVD系統建構商，以及PVD來源供應與開發的終端使用者
• 快速反應的氣體回饋管控