LEUVEN AIR BEARINGS N.V. (LAB Motion Systems)

Bekkevoort,  Belgium
https://www.labmotionsystems.com/
  • Booth: R7726

World leader for ultra precision air bearing motion stages.

Overview

Worldwide leader in precision & reliability!

Linear, rotary or multi-axis systems, we provide solutions for every motion challenge.

Rely on our product library or contact our experienced team of engineers to kick-start your R&D project.

LAB Motion Systems has 20 years of experience in development and production of high-performance motion systems. Our high-tech company specializes in the development of machines that require advanced motion performance. State-of-the-art motion control is realized for OEM integrations, special developments and research applications. LAB is your preferred partner from concept generation up to series production. No other company offers a broader knowledge of precision engineering in all its aspects. Mechatronics is the key driver in our activities: we offer cutting-edge bearing technology, high-performance direct drives, servo drivers, high-accuracy positioning feedback and integrated motion control.


  Products

  • Air bearing rotary tables
    Axial error < 50nm
    Radial error < 100nm
    Rotating speed 3500 RPM
    Perfectly designed for wafer inspection...

  • Air bearing rotary tables with encoder and motor integrated, driver and controller on request.

    Axial error < 50nm
    Radial error < 100nm
    Rotating speed 3500 RPM
    Perfectly designed for wafer inspection, Metrology, Synchrotrons, etc.

  • Rotary Z stage for un-Patterned wafer inspection
    Rotary
    Radial error motion 200 nm
    Axial error motion 200 nm
    Speed up to 2000 rpm in 2 seconds
    Absolute or incremental optical encoder
    MIM: 0,00x arcsec

    Z *
    Stroke 1.5 mm
    Bandwidth 100Hz
    Velocity 10 mm/s
    Encoder resolution 1 nm
    1 channel feedthrough included

    ...

  • Our latest innovation combines Rotary and Z-motions in one unified solution. Details are confidential at the moment due to pending patent applications. Please contact our sales department for more insight into this groundbreaking system.

    Compatible with analog position feedback sensor from customer (setpoint or main feedback), such as confocal sensor.

  • XYTZ with Active Vibration Control
    For Patterned wafer Inspection
    XY
    Velocity up to 850 mm/s
    Acceleration 1.5 G
    Position accuracy < ±0.5 µm

    Theta
    Travel range > ±2°
    Position accuracy < ±2 µrad

    Z
    Stroke 1.5 mm
    Bandwidth 100Hz
    Velocity 10 mm/s
    Encoder resolution 1 nm
    1 channel feedthrough included...

  • For patterned wafers we’ve combined our low-profile designed XYTZ stage with an active vibration isolation system and advanced control system that guarantees <100ms settling time.