Tohoku-MicroTec Co., Ltd

Sendai,  Miyagi 
Japan
http://www.t-microtec.com
  • Booth: Q6152

Latest 3D-IC manufacturing 3D stacking possible from IC chips

Overview

Foundry specializing in 3D-IC manufacturing

We provide 3D-ICs by applying TSV, redistribution, UBM, and bumping technologies to our customers' IC chips and IC wafers up to 12 inches in size.  We also offer prototyping services for Si interposers, heterogeneous stacked devices, chiplets, and other devices using the same technologies.

Core Technology

Low cost 3D-Soc Manufacturing Technology

Fine pitch Au micro-bump connection:We focus on a versatile bonding technology for silicon LSI, compound semiconductor, and microelectromechanical system devices at temperatures of less than 200 °C for heterogeneous integration w/o causing crystal damage.  Our new gold (Au) micro-bump technology is one of the promising candidates for this purpose.

We propose optimal solutions for 3D-IC by combining individual technologies such as TSV, μ-bumps, and RDL to design layouts and integration processes without degrading base IC chips. In addition, we are developing cutting-edge technologies such as high-precision, ultra-high-speed CtW stacking technology using self-assembly principle and the world's smallest pitch Au bump bonding technology.