ECM Greentech

Grenoble,  France
https://ecm-greentech.fr/
  • Booth: I2006

Your SEMI Partner with Equipment + Process Expertise

Overview

ECM Greentech SEMCO is present in the semiconductor market since 1986 and has extensive experience in engineering and manufacturing of mass-production and labortory furnaces for atmospheric and reduced-pressure processing as well as wafer transport automation and software control. 

The company's field of competence covers diffusion, oxidation, LPCVD and PECVD. Typiocal applications include LYDOP POCL3 and BCl3 Diffusion, LYTOX Wet and Dry Oxidation, Anneal, Silicon Nitride, Silicon Oxinitride, Poly Silicon and TEOS. To address the challenges attached to scaling from lab scale R&D to pilot line and volume manufacturing, SEMCO ECM proposes the MINILAB platform, an offsite  process development and qualification tool covering the complete range of above-named applications. 

SEMCO's Electrostatic Chucks offers smart solutions for clamping and processing of thin and ultra-thin wafers based on its proprietary ESC capacitive technology. SEMCO has been designing and manufacturing electrostatic chucks (ESC) and heating pedestals to the wafer processing industry since 1992. SEMCO ECM provides leading OEMs, Semiconductor Fabs, foundries and laboratories worldwide with innovative and efficient wafer handling components as original equipment or retrofit. The company actively manages global support through our subsidiaries and service centers.

ECM Components, sister Company of ECM Greentech, offers a complete range of gas components (Flowlink brand) dedicated to the distribution of pure and corrosive gases, including: bellows valves and diaphragm valves, control valves, complex valves manifolds, check valves, filters and accessories. ECM Components also designs gas panels and offers Kemstream's Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE, and all gas-phase processes. Kemstream Vapbox DLI vaporizers are capable of vaporizing a broad spectrum of organic and organometallic precursors, either at atmospheric pressure or under vacuum.

  Products

  • Wafer Processing Furnaces
    ECM Greentech semiconductor wafer processing furnaces are ideal for diffusion, oxidation, doping, LPCVD, PECVD, direct plasma, low RF, and other processes in wafer and cell manufacturing (Up to 300mm wafers). R&D/Lab to mass production......

    • ECM Greentech semiconductor wafer processing furnaces are ideal for diffusion, oxidation, doping, LPCVD, PECVD, direct plasma, low RF, and other processes in wafer and cell manufacturing (Up to 300mm wafers). R&D/Lab to mass production.

    DF-SERIES

    Mass production | Up to 300mm wafers

    • Batch-type production furnace
    • Up to 4 independent tubes
    • 50-400 wafers per tube
    • Diffusion, LPCVD, Oxidation

    TUBESTAR

    R&D/Small production horizontal furnace | Up to 300mm wafers

    • Batch-type tube furnace
    • 1-4 independent tubes
    • Up to 100 wafers per tube
    • Diffusion, LPCVD, Oxidation

    MEMSLAB

    R&D/Small production PECVD platform | Up to 300mm wafers

    • Batch-type PECVD furnace
    • Up to 25 wafers per batch
    • Direct Plasma, Low RF
  • SiC Batch Wafer Processing Systems
    Dedicated platforms for SiC wafer processing (4", 6", 8")......

    • Dedicated platforms for SiC wafer processing (4", 6", 8").
  • Electrostatic Chucks (E-CHUCKS)
    Semco’s Electrostatic Chucks are plug/play & available in multi-polarities, are reworkable, and have excellent thermal transfer under vacuum. Patented ESC technology provides long lifetime & high reliability. From -150°C up to 650°C......

    • Semco’s Electrostatic Chucks are plug and play and are available in multi polarities, are reworkable, and have an excellent thermal transfer under vacuum. Semco’s patented ESC technology provides long lifetime and high reliability.  Additionally, our ESCs work in a temperature range from -150°C upto 650°C, and can include embedded heaters up to 550°C.
  • RTP and DLI-CVD systems
    Leading manufacturer of Rapid Thermal Processing and Direct Liquid Injection Deposition systems......

    • RTP & RTCVD products

    Annealsys Rapid Thermal Processing (RTP) furnaces can address various applications with an extended temperature range and vacuum capability.

    DLI-CVD - DLI-ALD products

    Annealsys Direct Liquid Injection (DLI) deposition systems are using state of the art DLI vaporizers allowing the utilization of low vapor pressure and thermally unstable chemical precursors.

  • DLI VAPORIZERS
    Advanced vaporizers for all CVD and ALD processes....

    • KEMSTREAM has developed Vapbox series, a wide range of high-performing and fast response time direct liquid injection (DLI) vaporizers and evaporators.

    VAPBOX 300

    Compact and low cost DLI vaporizer that can operate up to 250°C. It features one high performance and proprietary Kemstream injection head (atomizer).

    VAPBOX 1500

    High performance and versatile DLI vaporizer that can operate up to 300°C. It features two proprietary Kemstream injection heads (atomizers).

    VAPBOX 4000

    High performance and highly versatile DLI vaporizer that can operate up to 250°C. It features four proprietary Kemstream injection heads (atomizers).

  • Gas Components/Panels
    The Flowlink offer of gas components covers a wide range of applications ; from standardized valves to custom-made complex components....

    • Flowlink gas components cover a wide range of sizes, pressures and temperatures, as well as applications such as : ultra high purity (UHP) and corrosive gas handling. We offer a catalog of standard products but also excel in designing and developing custom products that are manufactured in France. Our range of components covers : bellows, diaphragm, check and metering valves, filters and manifolds.

    Also specializes in the design and manufacturing of gas panels. Our team excels in providing the best expertise and service to support customers in optimizing their gas handling processes. Expertise in tubing design and manufacturing guarantees the best equipment quality. ECM Components gas panels can be adapted to a variety of
    applications and are fully customizable by integrating components from other bands (massflow, valves).
    • gas panels for industrial technology ; as found on our ECM group equipment
    • gas panels for advanced applications and markets ; such as photovoltaïc, nuclear or semiconductor.

Categories

207 Equipment, Process
  • Crystal Growing & Machining Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
    • 400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
    • 701 Manufacturing Services or Consulting
  • Assembly
  • Automation & Robotics
  • Equipment; Hardware; Product Design, Integration and Manufacturing
  • Manufacturing Process Support and Development
  • Test Services or Consulting
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